Structural analysis and electrical properties of pure Ge3N 4 dielectric layers formed by an atmospheric-pressure nitrogen plasma

Journal of Applied Physics

Volumn 110, Issue 6, 2011, Pages

  Hayakawa, Ryoma ^a   Yoshida, Masashi ^b   Ide, Kouta ^b   Yamashita, Yoshiyuki ^a   Yoshikawa, Hideki ^a   Kobayashi, Keisuke ^a   Kunugi, Shunsuke ^c   Uehara, Tsuyoshi ^c   Fujimura, Norifumi ^b  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b Osaka Prefecture University   (Japan)

^c SEKISUI CHEMICAL CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE VOLTAGE MEASUREMENTS; CURRENT SIMULATION; DIELECTRIC LAYER; FILM STRUCTURE; HIGH QUALITY; N-TYPE GE; PASSIVATION LAYER; PLASMA SYSTEMS; POST-OXIDATION; SYNCHROTRON RADIATION PHOTOELECTRON SPECTROSCOPY;

DIELECTRIC FILMS; ELECTRIC PROPERTIES; FIELD EFFECT TRANSISTORS; GERMANIUM; INTERFACES (MATERIALS); NITRIDES; PASSIVATION; PHOTOELECTRON SPECTROSCOPY; STRUCTURAL ANALYSIS; THIN FILMS;

NITROGEN PLASMA;

EID: 80053485430     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3638133     Document Type: Article

References (24)

1. M. L. Lee, C. W. Leitz, Z. Cheng, A. J. Pitera, T. Langdo, M. T. Currie, G. Taraschi, E. A. Fitzgerald, and D. A. Antoniadis, Appl. Phys. Lett. 79, 3344 (2001). 10.1063/1.1417515
2. C. O. Chui, S. Ramanathan, B. B. Triplett, P. C. Mclntyre, and C. Saraswat, IEEE Electron Device Lett. 23, 473 (2002). 10.1109/LED.2002.801319
3. F. L. Edelman, L. N. Alexandrov, L. I. Fedina, and V. S. Latuta, Thin Solid Films 34, 107 (1976). 10.1016/0040-6090(76)90144-9
4. H. Kim, P. C. Mclntyre, C. O. Chui, K. C. Saraswat, and M. H. Cho, Appl. Phys. Lett. 85, 2902 (2004). 10.1063/1.1797564
5. J. W. Seo, C. Dieker, J. P. Locquet, G. Mavrou, and A. Dimoulas, Appl. Phys. Lett. 87, 221906 (2005). 10.1063/1.2137897
6. T. Maeda, T. Yasuda, M. Nishizawa, and S. Takagi, Appl. Phys. Lett. 85, 3181 (2004). 10.1063/1.1805194
7. T. Sugawara, R. Sreenivasan, and P. C. Mclntyre, J. Vac. Sci. Technol. B 24, 2442 (2006). 10.1116/1.2348887
8. T. Maeda, M. Nishizawa, Y. Morita, and S. Takagi, Appl. Phys. Lett. 90, 072911 (2007). 10.1063/1.2679941
9. K. Kutsuki, G. Okamoto, T. Hosoi, T. Shimura, and H. Watanabe, Jpn. J. Appl. Phys. 47, 2415 (2008). 10.1143/JJAP.47.2415
10. G. A. Johnson and V. J. Kapoor, J. Appl. Phys. 69, 3616 (1991). 10.1063/1.348508
11. T. Maeda, T. Yasuda, M. Nishizawa, N. Miyata, Y. Morita, and S. Takagi, J. Appl. Phys. 100, 014101 (2006). 10.1063/1.2206395
12. K. Kutsuki, T. Hosoi, T. Shimura, and H. Watanabe, Appl. Phys. Lett. 91, 163501 (2007). 10.1063/1.2799260
13. K. Kato, H. Kondo, M. Sakashita, and S. Zaima, Thin Solid Films 518, S226 (2010). 10.1016/j.tsf.2009.10.094
14. Y. Otani, Y. Itayama, T. Tanaka, Y. Fukuda, H. Toyota, T. Ono, M. Mitsui, and K. Nakagawa, Appl. Phys. Lett. 90, 142114 (2007). 10.1063/1.2720345
15. R. Hayakawa, T. Yoshimura, A. Ashida, T. Uehara, and N. Fujimura, Thin Solid Films 506-507, 423 (2006). 10.1016/j.tsf.2005.08.106
16. N. Nakae, R. Hayakawa, T. Yoshimura, N. Fujimura, S. Kunugi, and T. Uehara, J. Appl. Phys. 101, 023513 (2007). 10.1063/1.2424501
17. R. Hayakawa, M. Nakae, T. Yoshimura, A. Ashida, N. Fujimura, M. Tagawa, and U. Teraoka, J. Appl. Phys. 100, 073710 (2006). 10.1063/1.2353781
18. R. Karcher, L. Ley, and R. L. Johnson, Phys. Rev. B 30, 1896 (1984). 10.1103/PhysRevB.30.1896
19. K. Muraoka, K. Kurihara, N. Yasuda, and H. Satake, J. Appl. Phys. 94, 2038 (2003). 10.1063/1.1588354
20. P. Cova, S. Poulin, O. Grenier, and R. A. Masut, J. Appl. Phys. 97, 73518 (2005). 10.1063/1.1881774
21. L. Kubler, F. Lutz, J. L. Bischoff, and D. Bolmont, Phys. Rev. B 38, 13113 (1988). 10.1103/PhysRevB.38.13113
22. S. J. Wang, J. W. Chai, J. S. Pan, and A. C. H. Huan, Appl. Phys. Lett. 89, 022105 (2006). 10.1063/1.2220531
23. G. Lucovsky, S. Lee, J. P. Long, H. Seo, and J. Lning, Appl. Surf. Sci. 254, 7933 (2008). 10.1016/j.apsusc.2008.03.157
24. T. Yoshida, D. Imafuku, J. L. Alay, S. Miyazaki, and M. Hirose, Jpn. J. Appl. Phys. 34, L903 (1995). 10.1143/JJAP.34.L903