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Volumn 506-507, Issue , 2006, Pages 423-426

Reaction of Si with excited nitrogen species in pure nitrogen plasma near atmospheric pressure

Author keywords

Atmospheric pressure; Nitridation of Si; Nitrogen plasma; Optical emission spectroscopy

Indexed keywords

ATMOSPHERIC PRESSURE; ELECTRIC DISCHARGES; ELECTRIC POTENTIAL; ELECTRODES; EMISSION SPECTROSCOPY; NITROGEN; PLASMAS; SUBSTRATES;

HERMAN'S INFRARED SYSTEM; NITRIDATION OF SI; NITROGEN PLASMA; OPTICAL EMISSION SPECTROSCOPY; SUBSTRATE TEMPERATURE;

SILICON NITRIDE;

EID: 33645236579 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.08.106 Document Type: Conference Paper

Times cited : (17)

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