Atomic Layer Deposition in MEMS Technology

Handbook of Silicon Based MEMS Materials and Technologies

Volumn , Issue , 2010, Pages 433-446

  Puurunen, Riikka L ^a   Kattelus, Hannu ^a   Suntola, Tuomo ^b  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b Picosun Oy   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 80052112780     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1016/B978-0-8155-1594-4.00026-7     Document Type: Chapter

References (32)

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