3D micromechanical compass

Sensor Letters

Volumn 5, Issue 1, 2007, Pages 126-129

  Kyynäräinen, Jukka ^a   Saarilahti, J ^a   Kattelus, H ^a   Meinander, T ^a   Suhonen, M ^a   Oja, A ^a   Seppa H ^a   Pekko, P ^a   Kuisma, H ^b   Ruotsalainen, S ^c   Tilli, M ^d  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b VTI Technologies Oy   (Finland)

^c Suunto Oy   (Finland)

^d Okmetic Oyj   (Finland)

Author keywords

Magnetic sensors; Magnetometers; MEMS; Micromechanics; Resonators

Indexed keywords

COMPASSES (MAGNETIC); CRYSTAL RESONATORS; LORENTZ FORCE; MAGNETIC FLUX; MAGNETIC SENSORS; MEMS; MICROMECHANICS; PHASE LOCKED LOOPS;

FLUX DENSITY RESOLUTION; VIBRATION AMPLITUDE;

MAGNETOMETERS;

EID: 34248590891     PISSN: 1546198X     EISSN: None     Source Type: Journal    
DOI: 10.1166/sl.2007.040     Document Type: Conference Paper

References (4)

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4. D. K. Wickenden, J. L. Champion, R. Osiander, R. B. Givens, J. L. Lamb, J. A. Miragliotta, D. A. Oursler, T. J. Kistenmacher, Acta Astron. 52, 421 (2003).