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Applied Surface Science

Volumn 257, Issue 23, 2011, Pages 10036-10041

Microstructures and optical properties of Cu-doped ZnO films prepared by radio frequency reactive magnetron sputtering

(5) Ma, Ligang a Ma, Shuyi a Chen, Haixia a Ai, Xiaoqian a Huang, Xinli a

a NORTHWEST NORMAL UNIVERSITY (China)

Author keywords

Cu doped ZnO thin films; Microstructure; Optical properties; RF magnetron sputtering; X ray diffraction

Indexed keywords

COPPER COMPOUNDS; CRYSTALLIZATION; II-VI SEMICONDUCTORS; MAGNETRON SPUTTERING; METALLIC FILMS; MICROSTRUCTURE; OPTICAL PROPERTIES; RADIO WAVES; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DOPING; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION; ZINC OXIDE;

CRYSTALLIZATION BEHAVIOR; CU-DOPED ZNO; FLUORESCENCE SPECTROPHOTOMETER; PHOTOLUMINESCENCE SPECTRUM; RADIO FREQUENCY REACTIVE MAGNETRON SPUTTERING; REACTIVE MAGNETRON SPUTTERING; RF-MAGNETRON SPUTTERING; STRUCTURAL AND OPTICAL PROPERTIES;

OPTICAL FILMS;

EID: 80051791957 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2011.06.134 Document Type: Article

Times cited : (125)

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