Generalized Keller-Simmons formula for nonisothermal plasma-assisted sputtering depositions

Applied Physics Letters

Volumn 89, Issue 21, 2006, Pages

  Palmero, A ^a   Rudolph, H ^a   Habraken, F H P M ^a  

^a UTRECHT UNIVERSITY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; PLASMA APPLICATIONS; PRESSURE EFFECTS; SYSTEMS ANALYSIS; THERMAL EFFECTS; THERMAL GRADIENTS; THIN FILMS;

KELLER-SIMMONS FORMULA; PRESSURE DISTANCE PRODUCTS;

SPUTTER DEPOSITION;

EID: 33845443633     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2392830     Document Type: Article

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