The influence of different doping elements on microstructure, piezoelectric coefficient and resistivity of sputtered ZnO film

Applied Surface Science

Volumn 253, Issue 3, 2006, Pages 1639-1643

  Wang, X B ^a   Song, C ^a   Li, D M ^a   Geng, K W ^a   Zeng, F ^a   Pan, F ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Doping element; Electrical resistivity; Piezoelectric coefficient; ZnO film

Indexed keywords

DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; MICROSTRUCTURE; PIEZOELECTRICITY; SPUTTERING; ZINC OXIDE;

DOPANTS; DOPING ELEMENT; PIEZOELECTRIC COEFFICIENT; ZNO FILM;

THIN FILMS;

EID: 33750726993     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.02.059     Document Type: Article

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