Effects of substrate temperature on crystallinity and electrical properties of Ga-doped ZnO films prepared on glass substrate by ion-plating method using DC arc discharge

Surface and Coatings Technology

Volumn 202, Issue 4-7, 2007, Pages 973-976

  Yamada, Takahiro ^a   Miyake, Aki ^a   Kishimoto, Seiichi ^a   Makino, Hisao ^a   Yamamoto, Naoki ^a   Yamamoto, Tetsuya ^a  

^a KOCHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

GZO; Ion plating; Low resistivity; Substrate temperature; Transparent conductive film; ZnO

Indexed keywords

CRYSTALLITES; ELECTRIC CONDUCTIVITY; ELECTRIC PROPERTIES; GALLIUM; PLATING; SUBSTRATES; ZINC OXIDE;

DC ARC DISCHARGE; ION PLATING; WILLIAMSON-HALL ANALYSIS;

CONDUCTIVE FILMS;

CONDUCTIVE FILMS; CRYSTALLITES; ELECTRIC CONDUCTIVITY; ELECTRIC PROPERTIES; GALLIUM; PLATING; SUBSTRATES; ZINC OXIDE;

EID: 36048968887     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.05.051     Document Type: Article

References (7)

1. Tanaka M., Makino H., Chikugo R., Sakemi T., and Awai K. J. Vac. Soc. Jpn. 44 (2001) 435
2. Iwata K., Sakemi T., Yamada A., Fons P., Awai K., Yamamoto T., Matsubara M., Tampo H., and Niki S. Thin Solid Films 445 (2003) 274
3. Yamada T., Ikeda K., Kishimoto S., Makino H., and Yamamoto T. Surf. Coat. Technol. 201 (2006) 4004
4. Yamada T., Kishimoto S., Makino H., Kuroiwa N., and Yamamoto T. Proc. of 6th int. Conf. on Coatings on Glass and Plastics (2006) 335
5. Uramoto J. J. Vac. Soc. Jpn. 25 (1982) 660
6. Jiang X., Jia C.L., and Szyszka B. Appl. Phys. Lett. 80 (2002) 3090
7. Williamson G.K., and Hall W.H. Acta Metall. 1 (1953) 22