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Volumn 49, Issue 2, 2011, Pages 176-182
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Violet and blue-green luminescence from Ti-doped ZnO films deposited by RF reactive magnetron sputtering
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Author keywords
Microstructure; Optical properties; RF magnetron sputtering; Ti doped zinc oxide
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Indexed keywords
DIFFRACTION PEAKS;
DOPED ZNO;
FLUORESCENCE SPECTROPHOTOMETER;
GREEN EMISSIONS;
GREEN LUMINESCENCE;
MICRO-STRUCTURAL;
PREFERRED ORIENTATIONS;
RADIO FREQUENCIES;
REACTIVE MAGNETRON SPUTTERING;
RESIDUAL COMPRESSIVE STRESS;
RF MAGNETRON SPUTTERING;
RF POWER;
RF REACTIVE MAGNETRON SPUTTERING;
ROOM TEMPERATURE;
SCANNING ELECTRONIC MICROSCOPY;
SEM;
TI DOPING;
TI-DOPED ZINC OXIDE;
ZNO FILMS;
ATOMIC FORCE MICROSCOPY;
DIFFRACTION;
DOPING (ADDITIVES);
LUMINESCENCE;
MAGNETRON SPUTTERING;
METALLIC FILMS;
MICROSTRUCTURE;
OXIDE FILMS;
SURFACE ROUGHNESS;
X RAY DIFFRACTION;
X RAY DIFFRACTION ANALYSIS;
ZINC;
ZINC OXIDE;
OPTICAL PROPERTIES;
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EID: 79551522564
PISSN: 07496036
EISSN: 10963677
Source Type: Journal
DOI: 10.1016/j.spmi.2010.12.005 Document Type: Article |
Times cited : (33)
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References (23)
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