Effects of post-annealing on the structure and properties of Al-doped zinc oxide films

Applied Surface Science

Volumn 183, Issue 1-2, 2001, Pages 18-25

  Chang, J F ^a   Lin, W C ^a   Hon, M H ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Annealed; Thin films; Transparent conductive oxide

Indexed keywords

AGGLOMERATION; ANNEALING; CHEMISORPTION; CONDUCTIVE FILMS; CRYSTAL STRUCTURE; DEPOSITION; DOPING (ADDITIVES); FILM PREPARATION; GRAIN BOUNDARIES; MAGNETRON SPUTTERING; OPACITY; PLASMA ETCHING; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC OXIDE;

AIR-ANNEALED FILMS;

METALLIC FILMS;

EID: 0035851256     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00541-4     Document Type: Article

References (23)