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Volumn 649, Issue 1, 2011, Pages 153-155

Development of a new generation of optical slope measuring profiler

Author keywords

Autocollimator; Long trace profiler; LTP; NOM; Surface metrology; Surface profilometer; Surface slope measurement; X ray optics

Indexed keywords

AUTOCOLLIMATORS; LONG TRACE PROFILER; LTP; NOM; SURFACE METROLOGY; SURFACE PROFILOMETER; SURFACE SLOPE MEASUREMENT;

EID: 79961167824     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2010.10.063     Document Type: Conference Paper
Times cited : (14)

References (30)
  • 2
    • 77950856361 scopus 로고    scopus 로고
    • X-ray optics metrology
    • third ed. M. Bass, McGraw-Hill New York chapter 46
    • P.Z. Takacs X-ray optics metrology third ed. M. Bass, Handbook of Optics vol. V 2009 McGraw-Hill New York chapter 46
    • (2009) Handbook of Optics , vol.5
    • Takacs, P.Z.1
  • 7
    • 79961171402 scopus 로고    scopus 로고
    • H. Lammert, T. Noll, T. Schlegel, F. Siewert, T. Zeschke, Patent #DE 103 03 659, Germany, 2005
    • H. Lammert, T. Noll, T. Schlegel, F. Siewert, T. Zeschke, Patent #DE 103 03 659, Germany, 2005.
  • 21
    • 79961170716 scopus 로고    scopus 로고
    • P.Z. Takacs, S. Qian, Surface profiling interferometer, Associated Universities, Patent #4,884,697, USA, 1989
    • P.Z. Takacs, S. Qian, Surface profiling interferometer, Associated Universities, Patent #4,884,697, USA, 1989.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.