Precision tiltmeter as a reference for slope measuring instruments

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6704, Issue , 2007, Pages

  Kirschman, Jonathan L ^a   Domning, Edward E ^a   Morrison, Gregory Y ^a   Smith, Brian V ^a   Yashchuk, Valeriy V ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Error reduction; Long trace profiler; LTP; Optical metrology; Reference; Slope measuring instrument; Tiltmeter; X ray optics

Indexed keywords

ERROR REDUCTION; LONG TRACE PROFILER (LTP); OPTICAL METROLOGY; SLOPE MEASURING INSTRUMENT; TILTMETER;

ERROR ANALYSIS; FREE ELECTRON LASERS; OPTICAL SYSTEMS; X RAY OPTICS;

SYNCHROTRONS;

EID: 42149087891     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.732610     Document Type: Conference Paper

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