Determination of the Young's modulus of pulsed laser deposited epitaxial PZT thin films

Journal of Micromechanics and Microengineering

Volumn 21, Issue 7, 2011, Pages

  Nazeer, H ^a   Nguyen, M D ^a   Woldering, L A ^a   Abelmann, L ^a   Rijnders, G ^a   Elwenspoek, M C ^a,b  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL RELATIONS; CRYSTAL DIRECTION; EFFECTIVE LENGTH; EPITAXIAL PZT; EPITAXIALLY GROWN; FINITE-ELEMENT; FLEXURAL RIGIDITIES; IN-PLANE ORIENTATION; MICRO-CANTILEVERS; OVER-ETCHING; PZT; PZT THIN FILM; RESONANCE FREQUENCIES; STANDARD ERRORS; YOUNG'S MODULUS;

DEPOSITION; ELASTIC MODULI; ELASTICITY; EPITAXIAL FILMS; EPITAXIAL GROWTH; NANOCANTILEVERS; NATURAL FREQUENCIES; PULSED LASER DEPOSITION; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; VAPOR DEPOSITION;

PULSED LASERS;

EID: 79960060727     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/7/074008     Document Type: Article

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