SCOPUS 정보 검색 플랫폼

Volumn 19, Issue 4, 2007, Pages 357-362

Taking piezoelectric microsystems from the laboratory to production

a SINTEF (Norway)

Author keywords

MEMS; Microsystems; Piezoceramics; Piezoelectric; Production; Thin film

Indexed keywords

MEMS; PERMITTIVITY; PIEZOELECTRIC MATERIALS; RELIABILITY; REMANENCE; THIN FILMS;

CHEMICAL SOLUTION DEPOSITION (CSD); DIELECTRIC DISSIPATION; LEAD ZIRCONATE TITANATE (PZT); PIEZOCERAMICS;

MICROSYSTEMS;

EID: 37249034703 PISSN: 13853449 EISSN: 15738663 Source Type: Journal
DOI: 10.1007/s10832-007-9036-3 Document Type: Article

Times cited : (18)

References (12)

1
- 37249026583
- (in press)
- W.E. Booij, A.H. Vogl, D.T. Wang, F. Tyholdt, N.P. Østbø, H. Ræder, K. Prume, J. Electroceramics, (2006) (in press)
- (2006) J. Electroceramics
- Booij, W.E.¹ Vogl, A.H.² Wang, D.T.³ Tyholdt, F.⁴ Østbø, N.P.⁵ Ræder, H.⁶ Prume, K.⁷

2
- 0022223880
- K.D. Budd, S.K. Dey, D.A. Payne, Br. Ceram. Proc. 36, 107 (1985)
- (1985) Br. Ceram. Proc. , vol.36 , pp. 107
- Budd, K.D.¹ Dey, S.K.² Payne, D.A.³

4
- 0021535930
- Wiley NY
- S.R. Gurkovich, J.B. Blum, in Ultrastruct. Process. Ceram., Glasses, Compos, ed. by L.L. Hench, D.R. Ulrich (Wiley, NY, 1984), p. 152
- (1984) Ultrastruct. Process. Ceram., Glasses, Compos , pp. 152
- Gurkovich, S.R.¹ Blum, J.B.² Hench, L.L.³ Ulrich, D.R.⁴

5
- 10844256774
- N. Ledermann, P. Muralt, J. Baborowski, M. Forster, J.-P. Pellaux, J. Micromechanics Microengineering, 1650 (2004)
- (2004) J. Micromechanics Microengineering , pp. 1650
- Ledermann, N.¹ Muralt, P.² Baborowski, J.³ Forster, M.⁴ Pellaux, J.-P.⁵

6
- 0037899581
- N. Ledermann, P. Muralt, J. Baborowski, S. Gentil, K. Mukati, M. Cantoni, A. Seifert, N. Setter, Sens. Actuators, A A105, 162 (2003)
- (2003) Sens. Actuators, A , vol.105 , pp. 162
- Ledermann, N.¹ Muralt, P.² Baborowski, J.³ Gentil, S.⁴ Mukati, K.⁵ Cantoni, M.⁶ Seifert, A.⁷ Setter, N.⁸

7
- 0033682798
- 2
- P. Muralt, J. Micromechanics Microengineering 10(2), 136-146 (2000)
- (2000) J. Micromechanics Microengineering , vol.10 , pp. 136-146
- Muralt, P.¹

8
- 33846280078
- K. Prume, P. Muralt, F. Calame, T. Schmitz-Kempen, S. Tiedke, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 54, 8-14 (2007)
- (2007) IEEE Trans. Ultrason. Ferroelectr. Freq. Control , vol.54 , pp. 8-14
- Prume, K.¹ Muralt, P.² Calame, F.³ Schmitz-Kempen, T.⁴ Tiedke, S.⁵

9
- 0035034422
- A. Seifert, N. Ledermann, S. Hiboux, J. Baborowski, P. Muralt, N. Setter, Integr. Ferroelectr. 35, 159 (2001)
- (2001) Integr. Ferroelectr. , vol.35 , pp. 159
- Seifert, A.¹ Ledermann, N.² Hiboux, S.³ Baborowski, J.⁴ Muralt, P.⁵ Setter, N.⁶

10
- 3142722583
- Thin film piezoelectrics for MEMS
- S. Trolier-McKinstry, P. Muralt, J. Electroceramics 12, 7-17 (2004)
- (2004) J. Electroceramics , vol.12 , pp. 7-17
- Trolier-Mckinstry, S.¹ Muralt, P.²

11
- 37249020758
- in press
- F. Tyholdt, F. Calame, K. Prume, W. Booij, H. Ræder, P. Muralt, J. Electroceramics, (2006) (in press)
- (2006) J. Electroceramics
- Tyholdt, F.¹ Calame, F.² Prume, K.³ Booij, W.⁴ Ræder, H.⁵ Muralt, P.⁶

12
- 0035556398
- 39/1
- L.P. Wang, R. Wolf, Q. Zhou, S. Trolier-McKinstry, R.J. Davis, Mater. Res. Soc. Symp. Proc. 657, EE5 39/1 (2001)
- (2001) Mater. Res. Soc. Symp. Proc. , vol.657 , pp. 5
- Wang, L.P.¹ Wolf, R.² Zhou, Q.³ Trolier-Mckinstry, S.⁴ Davis, R.J.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.