FE modeling of stress and deflection of PZT actuated micro-mirror: Effect of crystal anisotropy

Computational Materials Science

Volumn 48, Issue 2, 2010, Pages 349-359

  Matin, M A ^a   Akai, D ^a   Kawazu, N ^a   Hanebuchi, M ^b   Sawada, K ^a   Ishida, M ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^b NIDEK CO LTD   (Japan)

Author keywords

Anisotropy; Deflection; Finite element analysis; Micro mirror; PZT actuation; Thermomechanical stress

Indexed keywords

ANISOTROPIC PROPERTY; CRYSTAL ANISOTROPY; FE MODELING; FE-SIMULATION; FINITE ELEMENT ANALYSIS; FINITE ELEMENT MODELING; INDISPENSABLE TOOLS; ISOTROPIC PROPERTY; LEAD ZIRCONATE TITANATE; LOWER STRESS; MATERIAL ANISOTROPY; MICRO MIRROR; OPTIMAL DESIGN; PZT; PZT ACTUATION; PZT MATERIALS; SILICON SUBSTRATES; THERMO-MECHANICAL; THERMO-MECHANICAL STRESS;

ANISOTROPY; DEFLECTION (STRUCTURES); MATERIALS PROPERTIES; MIRRORS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; SEMICONDUCTING LEAD COMPOUNDS;

FINITE ELEMENT METHOD;

EID: 77949488982     PISSN: 09270256     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.commatsci.2010.01.020     Document Type: Article

References (24)

1. H. Fujita, MEMS/MOEMS application to optical communication, in: Proceedings of SPIE, 2001, pp. 11-17.
2. Ikeda T. Fundamentals of Piezoelectricity (1990), Oxford Science Publications, Oxford University Press, Walton Street, Oxford OX2 6DP p. 55
3. Ueha S., and Tomikawa Y. Ultrasonic Motors: Theory and Applications (1993), Oxford Science Publications, Clarendon Press, Walton Street, Oxford OX2 6DP p. 253
4. Côoté F., Masson P., Mrad N., and Cotoni V. Composite Structurs 65 (2004) 471-484
5. McSkimin H.J., and Andreatch J.P. Journal of Applied Physics 35 (1964) 2161-2165
6. Bayram B., Oralkan O., Ergun S., Hggström E., Yaralioglu G.G., and Khuri-Yakub B.T. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 52 (2005) 326-339
7. Schroth A., lee C., Matsumoto S., and maeda R. Sensors and Actuators 73 (1999) 144-152
8. Cordano D., Carnevale G., and Bocciarelli M. Computational Materials Science 43 (2008) 951-956
9. Ishida M., Katakabe I., and Nakamura T. Applied Physics Letters 52 (1988) 1326-1328
10. Sawada K., ishida M., and Nakamura T. Applied Physics Letters 52 (1988) 1672-1674
11. Merckling C., El-Kazzi M., Becerra L., Largeau L., Patriarche G., Saint-Girons G., and Hollinger G. Microelectronic Engineering 84 (2007) 2243-2246
12. Akai D., Sawada K., and Ishida M. Journal of Crystal Growth 259 (2003) 90-94
13. Jeurgens L.P.H., Sloof W.G., Tichelaar F.D., and mittemeijer E.J. Physical Review B 62 (2000) 4707-4719
14. Ren R., Zhang H., Liu S., and Wang J. Sensors and Actuators B 123 (2007) 135-141
15. van Driel W.D., Janssen J.H.J., Zhang G.Q., Yang D.G., and Ernst L.J. Transactions of the ASME 125 (2003) 520-526
16. %3chttp://www.indium.com/products/indiummetal/physicalconstants.php%3e.
17. Borrelli A., Patria M.C., and Horgan C.O. International Journal of Solids and Structures 43 (2006) 943-956
18. Kim J., Varadan V.V., and Varadan V.K. International Journal of Numerical Methods in Engineering 140 (1997) 817-832
19. Daros C.H., and Antes H. Wave Motion 31 (2000) 237-253
20. M.W. Hooker, Properties of PZT-based piezoelectric ceramics between -150 and 250 °C. Report: NASA/CR-1998-208708, National Aeronautics and Space Administration, Lewis Research Center, 1998.
21. D. Berlincourt, H.H.A. Krueger, Properties of specialized clevite ceramics, pp. 1-7. %3chttp://www.morganelectroceramics.com/pdfs/tp226.pdf%3e.
22. Kumar A., and Chakraborty D. Materials and Design 30 (2009) 1216-1222
23. Zheng X.J., Zhou Y.C., and Nin M.Z. International Journal of Solids and Structures 39 (2002) 3935-3957
24. D. Berlincourt, H.H.A. Krueger, C. Near, Properties of morgan electro ceramics. Technical publication TP-226: Properties of piezoelectricity ceramics, pp. 1-12. %3chttp://www.morganelectroceramics.com/pdfs/tp232.pdf%3e.