Silicon nitride cantilever array integrated with silicon heaters and piezoelectric detectors for probe-based data storage

Sensors and Actuators, A: Physical

Volumn 134, Issue 2, 2007, Pages 329-333

  Nam, Hyo Jin ^a   Kim, Young Sik ^a   Lee, Caroline Sunyong ^a   Jin, Won Hyeog ^a   Jang, Seong Soo ^a   Cho, Il Joo ^a   Bu, Jong Uk ^a   Choi, Woo Beom ^b   Choi, Seung Woo ^b  

^a LG Electronics Inc   (South Korea)

^b BNP Science ^*  (South Korea)

Author keywords

Atomic force microscopy; Cantilever; Piezoelectric; Probe; Probe based data storage; Tip

Indexed keywords

DATA STORAGE EQUIPMENT; PIEZOELECTRIC DEVICES; SENSITIVITY ANALYSIS; SILICON NITRIDE; THIN FILMS;

PIEZOELECTRIC SENSORS; PROBE BASED DATA STORAGE; SILICON HEATERS; SILICON NITRIDE CANTILEVER ARRAYS;

SENSOR ARRAYS;

EID: 33847647231     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.05.030     Document Type: Article

References (6)

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