Fabrication and characterization of 50 nm silicon nano-gap structures

Science of Advanced Materials

Volumn 3, Issue 2, 2011, Pages 233-238

  Dhahi, T S ^a   Hashim, U ^a   Ahmed, N M ^b  

^a UNIVERSITY MALAYSIA PERLIS   (Malaysia)

^b SCHOOL OF PHYSICS   (Malaysia)

Author keywords

Nano gap; Nanostructure; Optical characterization; Pattern size reduction; Photolithography

Indexed keywords

EID: 79958257947     PISSN: 19472935     EISSN: 19472943     Source Type: Journal    
DOI: 10.1166/sam.2011.1155     Document Type: Article

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