Fabrication of silicon dioxide nanochannel arrays without nanolithography for manipulation of DNA molecule

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 1275-1277

  Cho, Y H ^a   Lee, S W ^a   Fujii, T ^a   Kim, B J ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

KOH anisotropic etching; LOCOS; Single DNA stretching; SiO2 nanochannel

Indexed keywords

ANISOTROPIC ETCHING; DNA; NANOLITHOGRAPHY; PLASMA ETCHING; SILICA;

NANOCHANNELS; NANOSCALE DIMENSIONS; SINGLE DNA STRETCHING;

MOLECULAR ELECTRONICS;

ETCHING; LITHOGRAPHY; MOLECULAR STRUCTURE; NUCLEIC ACIDS; SILICA;

EID: 44149101439     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.03.001     Document Type: Article

References (18)

1. Han J., and Craighead H.G. Science 288 (2000) 1026
2. Tegenfeldt J.O., Prinz C., Cao H., et al. Anal. Bioanal. Chem. 378 (2004) 1678
3. Mukhopadhyay R. Anal. Chem. 78 (2006) 7379
4. Mannion J.T., Reccius C.H., Cross J.D., and Craighead H.G. Biophys. J. 90 (2006) 4538
5. Wang K., Yue S., et al. Microfluid. Nanofluid. 2 (2006) 85
6. Riehn R., Lu M., et al. Proc. Natl. Acad. Sci. USA 102 (2005) 10012
7. Tamaki E., Hibara A., Kim H.B., Tokeshi M., and Kitamori T. J. Chromatogr. A 1137 (2006) 256
8. Cao H., Yu Z.N., et al. Appl. Phys. Lett. 81 (2002) 174
9. Guo L.J., Cheng X., and Chou C.F. Nano Lett. 4 (2004) 69
10. Dumond J.J., Low H.Y., and Rodriguez I. Nanotechnology 17 (2006) 1975
11. Yang B., and Pang S.W. J. Vac. Sci. Technol. B 24 (2006) 2984
12. Cheng G.J., Pirzada D., and Dutta P.J. J. Microlith., Microfab. Microsyst. 4 (2005) 013009
13. Zeng H., Wan Z., and Feinerman A.D. Nanotechnology 17 (2006) 3183
14. Lee C., Yang E.H., Myung N.V., and George T. Nano Lett. 3 (2003) 1339
15. Han P., de Rooij N.F., and Staufer U. Nanotechnology 17 (2006) 2498
16. Vangbo M., and Backlund Y. J. Micromech. Microeng. 6 (1996) 279
17. Gao Z., Agarwal A., Trigg A.D., Singh N., Fang C., Tung C.H., Fan Y., Buddharaju K.D., and Kong J. Anal. Chem. 79 (2007) 3291
18. Cho Y.H., Lee S.W., Kim B.J., and Fujii T. Nanotechnology 18 46 (2007) 465303