Fabrication of silicon dioxide submicron channels without nanolithography for single biomolecule detection

Nanotechnology

Volumn 18, Issue 46, 2007, Pages

  Cho, Y H ^a   Lee, S W ^a   Kim, B J ^a   Fujii, T ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPIC ETCHING; NANOFLUIDICS; NANOLITHOGRAPHY; PLASMA ETCHING; POTASSIUM HYDROXIDE; SILICA;

HIGH-THROUGHPUT FABRICATION; NANOCHANNEL ARRAYS; NANOFLUIDIC CHANNELS; SINGLE BIOMOLECULE DETECTION;

BIOMOLECULES;

NANOCHANNEL; POTASSIUM HYDROXIDE; SILICON DIOXIDE;

ANISOTROPY; ARTICLE; MICROARRAY ANALYSIS; NANOANALYSIS; NANOFABRICATION; NANOFLUIDICS; NANOLITHOGRAPHY; OXIDATION; PRIORITY JOURNAL; SOLUTION AND SOLUBILITY; TECHNIQUE;

ETCHING; FLUIDICS; LITHOGRAPHY; POTASSIUM HYDROXIDE; SILICA;

EID: 36049009483     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/18/46/465303     Document Type: Article

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