SCOPUS 정보 검색 플랫폼

Volumn 253, Issue 1, 2010, Pages

Structure-related strain and stress in thin hydrogenated microcrystalline silicon films

(8) Christova, K a Alexandrova, S b Abramov, A c Valcheva, E d Ranguelov, B e Longeaud, C f Reynolds, S g Roca I Cabarrocas, P c

a INSTITUTE OF SOLID STATE PHYSICS (Bulgaria)

b TECHNICAL UNIVERSITY OF SOFIA (Bulgaria)

c LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES (France)

d UNIVERSITY OF SOFIA (Bulgaria)

e INSTITUTE OF PHYSICAL CHEMISTRY (Bulgaria)

f UNIV PARIS SUD (France)

g UNIVERSITY OF DUNDEE (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGENATION; MOLECULAR ELECTRONICS; NANOCRYSTALLITES; NANOCRYSTALS; RAMAN SCATTERING; SILICON WAFERS; STRESS-STRAIN CURVES; THIN FILMS;

CRYSTALLINE FILMS; DEPOSITED FILMS; HYDROGENATED MICROCRYSTALLINE SILICON; INTRINSIC STRESS; MECHANICAL COEFFICIENTS; STRAIN AND STRESS; STRUCTURE-RELATED; WAFER CURVATURE MEASUREMENT;

MICROCRYSTALLINE SILICON;

EID: 79952405693 PISSN: 17426588 EISSN: 17426596 Source Type: Conference Proceeding
DOI: 10.1088/1742-6596/253/1/012056 Document Type: Conference Paper

Times cited : (3)

References (33)

1
- 0033895421
- Sirenko A A, Fox J R, Akimov I A, Xi X X, Ruvimov S and Liliental-Weber Z 2000 Solid State Comm. 113 553
- (2000) Solid State Comm. , vol.113 , Issue.10 , pp. 553
- Sirenko, A.A.¹ Fox, J.R.² Akimov, I.A.³ Xi, X.X.⁴ Ruvimov, S.⁵ Liliental-Weber, Z.⁶

2
- 0036802214
- Ye D-X, Zhao Y-P, Yang G-R, Zhao Y-G, Wang G-C and Lu T-M 2002 Nanotechnol. 13 615
- (2002) Nanotechnol. , vol.13 , pp. 615
- Ye, D.-X.¹ Zhao, Y.-P.² Yang, G.-R.³ Zhao, Y.-G.⁴ Wang, G.-C.⁵ Lu, T.-M.⁶

3
- 70350643854
- Pan B, Qian K, Xie H and Asundi A 2009 Meas. Sci. Technol. 20 062001
- (2009) Meas. Sci. Technol. , vol.20 , Issue.6 , pp. 062001
- Pan, B.¹ Qian, K.² Xie, H.³ Asundi, A.⁴

4
- 33744551882
- Vallat-Sauvain E, Droz C, Meillaud F, Bailat J, Shah A and Ballif C 2006 J. Non-Cryst. Solids 352 1200
- (2006) J. Non-Cryst. Solids , vol.352 , Issue.9-20 , pp. 1200
- Vallat-Sauvain, E.¹ Droz, C.² Meillaud, F.³ Bailat, J.⁴ Shah, A.⁵ Ballif, C.⁶

5
- 79952381165
- (San Francisco, CA) 5-9 April 2010
- Trask J, Cui L, Wagner A and Kortshagen U 2010 Materials Research Society Spring Meeting (San Francisco, CA) p 131 5-9 April 2010
- (2010) Materials Research Society Spring Meeting , pp. 131
- Trask, J.¹ Cui, L.² Wagner, A.³ Kortshagen, U.⁴

6
- 42649144794
- Su T, Ju Tong, Yan Baojie, Yang Jeffery, Guha S and Craig Taylor P 2008 J. Non-Cryst. Solids 354 2231
- (2008) J. Non-Cryst. Solids , vol.354 , Issue.19-25 , pp. 2231
- Su, T.¹ Tong, J.² Baojie, Y.³ Jeffery, Y.⁴ Guha, S.⁵ Craig Taylor, P.⁶

7
- 79952371494
- (San Francisco) CA, 24-28 March
- Yan Baojie, Yue Guozhen, Yan Yanfa, Jiang Chun-Sheng, Teplin C W, Yang Jeffery and Guha S 2008 Materials Research Society Spring Meeting (San Francisco) p 1955 CA, 24-28 March 2008
- (2008) Materials Research Society Spring Meeting , pp. 1955
- Baojie, Y.¹ Guozhen, Y.² Yanfa, Y.³ Chun-Sheng, J.⁴ Teplin, C.W.⁵ Jeffery, Y.⁶ Guha, S.⁷

8
- 0000073841
- Stoney G 1909 Proc. R. Soc. London A 82 172
- (1909) Proc. R. Soc. London A , vol.82 , Issue.553 , pp. 172
- Stoney, G.¹

9
- 67349240399
- Ram S, Islam Md, Kumar S and Roca i Cabarrocas P 2009 Mater. Sci. Eng. B 159-160 34
- (2009) Mater. Sci. Eng. B , vol.159-160 , pp. 34
- Ram, S.¹ Md, I.² Kumar, S.³ Roca Cabarrocas, I.P.⁴

10
- 0000471720
- Poruba A, Fejfar A, Remes Z, Springer J, Vanecek M, Kocka J, Meier J, Torres P and Shah A 2000 J. Appl. Phys. 88 148
- (2000) J. Appl. Phys. , vol.88 , Issue.1 , pp. 148
- Poruba, A.¹ Fejfar, A.² Remes, Z.³ Springer, J.⁴ Vanecek, M.⁵ Kocka, J.⁶ Meier, J.⁷ Torres, P.⁸ Shah, A.⁹

11
- 0030081591
- De Wolf I 1996 Semicond. Sci. Technol. 11 139
- (1996) Semicond. Sci. Technol. , vol.11 , Issue.2 , pp. 139
- De Wolf, I.¹

12
- 0038102536
- De Wolf I 2003 Spectroscopy Europe 15 6
- (2003) Spectroscopy Europe , vol.15 , Issue.2 , pp. 6
- De Wolf, I.¹

13
- 79952367615
- ed R Merlin (Berlin: Springer)
- Weber W 2000 Springer Series in Materials Science vol 42 ed R Merlin (Berlin: Springer) p 81
- (2000) Springer Series in Materials Science , vol.42 , pp. 81
- Weber, W.¹

14
- 33144481490
- Faraci G, Gibilisco S, Russo P and Pennisi A R 2006 Phys. Rev. B 73 033307
- (2006) Phys. Rev. B , vol.73 , Issue.3 , pp. 033307
- Faraci, G.¹ Gibilisco, S.² Russo, P.³ Pennisi, A.R.⁴

15
- 0001036123
- Wu X L, Siu G G, Tong S, Liu X N, Yan F, Jiang S S, Zhang X K and Feng D 1996 Appl. Phys. Lett. 69 523
- (1996) Appl. Phys. Lett. , vol.69 , Issue.4 , pp. 523
- Wu, X.L.¹ Siu, G.G.² Tong, S.³ Liu, X.N.⁴ Yan, F.⁵ Jiang, S.S.⁶ Zhang, X.K.⁷ Feng, D.⁸

16
- 0000171554
- Fujii M, Kanzawa Y, Hayashi S and Yamamoto K 1996-II Phys. Rev. B 54 R8373
- (1996) Phys. Rev. B , vol.54 , Issue.12 , pp. 8373
- Fujii, M.¹ Kanzawa, Y.² Hayashi, S.³ Yamamoto, K.⁴

17
- 0000163497
- Ager III J, Veirs D and Rosenblatt G 1991-I Phys. Rev. B 43 6491
- (1991) Phys. Rev. B , vol.43 , Issue.8 , pp. 6491
- Ager Iii, J.¹ Veirs, D.² Rosenblatt, G.³

18
- 2942558803
- Fujiwara H, Kondo M and Matsuda A 2004 J. Non-Cryst. Solids 338-340 97
- (2004) J. Non-Cryst. Solids , vol.338-340 , pp. 97
- Fujiwara, H.¹ Kondo, M.² Matsuda, A.³

19
- 0033907222
- Fontcuberta i Morral A, Bertomeu J and Roca i Cabarrocas P 2000 Mater. Sci.Eng. B 69-70 559
- (2000) Mater. Sci.Eng. B , vol.69-70 , pp. 559
- Fontcuberta Morral, I.A.¹ Bertomeu, J.² Roca Cabarrocas, I.P.³

20
- 40949103134
- Müllerov J, utta P, van Elzakker G, Zeman M and Mikula M 2008 Appl. Surf. Sci. 254 3690
- (2008) Appl. Surf. Sci. , vol.254 , Issue.12 , pp. 3690
- Müllerov, J.¹ Utta, P.² Van Elzakker, G.³ Zeman, M.⁴ Mikula, M.⁵

21
- 0000671779
- Kroll U, Meier J, Shah A, Mikhailov S and Weber J 1996 J. Appl. Phys. 80 4971
- (1996) J. Appl. Phys. , vol.80 , Issue.9 , pp. 4971
- Kroll, U.¹ Meier, J.² Shah, A.³ Mikhailov, S.⁴ Weber, J.⁵

22
- 79955992879
- Stratakis E, Spanakis E, Tzanetakis P, Fritzsche H, Guha S and Yang J 2002 Appl. Phys. Lett. 80 1734
- (2002) Appl. Phys. Lett. , vol.80 , Issue.10 , pp. 1734
- Stratakis, E.¹ Spanakis, E.² Tzanetakis, P.³ Fritzsche, H.⁴ Guha, S.⁵ Yang, J.⁶

23
- 0036539761
- Paillard V, Puech P and Roca i Cabarrocas P 2002 J. Non-Cryst. Solids 299-302 280
- (2002) J. Non-Cryst. Solids , vol.299-302 , pp. 280
- Paillard, V.¹ Puech, P.² Roca Cabarrocas, I.P.³

24
- 0003602826
- San Diego, CA: Academic Press
- Ohring M 1992 The materials science of thin films (San Diego, CA: Academic Press) p 429
- (1992) The Materials Science of Thin Films , pp. 429
- Ohring, M.¹

25
- 33749630822
- Fontcuberta i Morral A and Roca i Cabarrocas P 2006 Eur. Phys. J. Appl. Phys. 35 165
- (2006) Eur. Phys. J. Appl. Phys. , vol.35 , Issue.3 , pp. 165
- Fontcuberta Morral, I.A.¹ Roca Cabarrocas, I.P.²

26
- 0001322657
- Hamers E A G, Fontcuberta i Morral A, Niikura C, Brenot R and Roca i Cabarrocas P 2000 J. Appl. Phys. 88 3674
- (2000) J. Appl. Phys. , vol.88 , Issue.6 , pp. 3674
- Hamers, E.A.G.¹ Fontcuberta Morral, I.A.² Niikura, C.³ Brenot, R.⁴ Roca Cabarrocas, I.P.⁵

27
- 0037769611
- Collins R W, ferlauto A S, Ferreira G M, Chen Chi, Koh J, Koval R J, Lee Y, Pearce J M and Wronski C R 2003 Solar Energy Mater. Solar Cells 78 143
- (2003) Solar Energy Mater. Solar Cells , vol.78 , Issue.1-4 , pp. 143
- Collins, R.W.¹ Ferlauto, A.S.² Ferreira, G.M.³ Chi, C.⁴ Koh, J.⁵ Koval, R.J.⁶ Lee, Y.⁷ Pearce, J.M.⁸ Wronski, C.R.⁹

28
- 0348137163
- Roca i Cabarrocas P 2000 J. Non-Cryst. Solids 266-269 31
- (2000) J. Non-Cryst. Solids , vol.266-269 , pp. 31
- Roca, I.¹ Cabarrocas, P.²

29
- 79952370364
- Li Juan, Wu C, Meng Z, Liu J, Zhao S, Xiong S and Zhang L 2005 Chinese J. Semicond. 26 ISSN: 0253-4177
- (2005) Chinese J. Semicond. , vol.26
- Juan, L.¹ Wu, C.² Meng, Z.³ Liu, J.⁴ Zhao, S.⁵ Xiong, S.⁶ Zhang, L.⁷

30
- 34547559706
- Djeridane Y, Abramov A and Roca i Cabarrocas P 2007 Thin Solid Films 515 7451
- (2007) Thin Solid Films , vol.515 , Issue.19 , pp. 7451
- Djeridane, Y.¹ Abramov, A.² Roca Cabarrocas, I.P.³

31
- 33947331746
- Gouadec G and Colomban P 2007 Progress Cryst. Growth Character. Mater. 53 1
- (2007) Progress Cryst. Growth Character. Mater. , vol.53 , Issue.1 , pp. 1
- Gouadec, G.¹ Colomban, P.²

32
- 0000699182
- Anastassakis E, Cantarero A and Cardona M 1990 Phys. Rev. B 41 7529
- (1990) Phys. Rev. B , vol.41 , Issue.11 , pp. 7529
- Anastassakis, E.¹ Cantarero, A.² Cardona, M.³

33
- 65149097395
- Lee H C, Hong S P, Kang S K and Yeom G Y 2009 Thin Solid Films 517 4100
- (2009) Thin Solid Films , vol.517 , Issue.14 , pp. 4100
- Lee, H.C.¹ Hong, S.P.² Kang, S.K.³ Yeom, G.Y.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.