The role of hydrogen in the formation of microcrystalline silicon

Materials Science and Engineering: B

Volumn 69-70, Issue , 2000, Pages 559-563

  Fontcuberta i Morral, A ^a   Bertomeu, J ^a   Roca i Cabarrocas, P ^b  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

^b UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Hydrogen; Low temperatures; Microcrystalline silicon films

Indexed keywords

ELECTRIC CONDUCTIVITY MEASUREMENT; ELLIPSOMETRY; FILM GROWTH; HIGH RESOLUTION ELECTRON MICROSCOPY; LOW TEMPERATURE OPERATIONS; SEMICONDUCTING FILMS; TRANSMISSION ELECTRON MICROSCOPY;

DARK CONDUCTIVITY;

SEMICONDUCTING SILICON;

EID: 0033907222     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(99)00324-4     Document Type: Article

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