Evolution of microstructure and phase in amorphous, protocrystalline, and microcrystalline silicon studied by real time spectroscopic ellipsometry

Solar Energy Materials and Solar Cells

Volumn 78, Issue 1-4, 2003, Pages 143-180

  Collins, R W ^a   Ferlauto, A S ^a   Ferreira, G M ^a   Chen, Chi ^a   Koh, Joohyun ^a   Koval, R J ^a   Lee, Yeeheng ^a   Pearce, J M ^a   Wronski, C R ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Hydrogenated silicon; Spectroscopic ellipsometry; Thin films

Indexed keywords

ELLIPSOMETRY; FILM GROWTH; HYDROGENATION; MICROSTRUCTURE; PHASE DIAGRAMS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON SOLAR CELLS; SPECTROSCOPIC ANALYSIS; THIN FILMS;

MICROCRYSTALLINITY; PROTOCRYSTALLINITY;

AMORPHOUS SILICON;

EID: 0037769611     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(02)00436-1     Document Type: Article

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