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EPJ Applied Physics

Volumn 35, Issue 3, 2006, Pages 165-172

Role of hydrogen diffusion on the growth of polymorphous and microcrystalline silicon thin films

(2) Fontcuberta i Morral, A a Roca i Cabarrocas, P a

a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; DIFFUSION; ELLIPSOMETRY; ETCHING; HYDROGEN; SILICON; SPECTROSCOPIC ANALYSIS;

ATOMIC HYDROGEN FLOW; HYDROGEN DIFFUSION; POLYMORPHOUS SILICON; POLYMORPHOUS SILICON FILMS;

THIN FILMS;

EID: 33749630822 PISSN: 12860042 EISSN: 12860050 Source Type: Journal
DOI: 10.1051/epjap:2006094 Document Type: Article

Times cited : (15)

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