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Volumn 159-160, Issue C, 2009, Pages 34-37
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Evidence of bimodal crystallite size distribution in μc-Si:H films
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Author keywords
Atomic force microscopy (AFM); Ellipsometry; Raman spectroscopy; Silicon; Structural properties; Thin films
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Indexed keywords
CRYSTAL ATOMIC STRUCTURE;
CRYSTALLITE SIZE;
METALLIC FILMS;
MICROCRYSTALLINE SILICON;
SPECTROSCOPIC ELLIPSOMETRY;
THIN FILMS;
X RAY DIFFRACTION;
ATOMIC FORCE MICROSCOPY;
ATOMIC-FORCE-MICROSCOPY;
BIMODAL SIZE DISTRIBUTION;
CHARACTERIZATION STUDIES;
CRYSTALLITE SIZE DISTRIBUTION;
DECONVOLUTIONS;
MICROCRYSTALLINE SILICON FILMS;
MICROSTRUCTURAL CHARACTERIZATIONS;
THIN-FILMS;
ΜC-SI;
ATOMIC FORCE MICROSCOPY;
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EID: 67349240399
PISSN: 09215107
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mseb.2008.11.048 Document Type: Article |
Times cited : (6)
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References (20)
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