Raman spectroscopy: About chips and stress

Spectroscopy Europe

Volumn 15, Issue 2, 2003, Pages

  De Wolf, Ingrid ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; COMPUTER SIMULATION; MASKS; MICROELECTROMECHANICAL DEVICES; OXIDATION; PHONONS; SEMICONDUCTING SILICON; X RAY DIFFRACTION;

LOCAL OXIDATION OF SILICON; PHONON FREQUENCIES; THERMAL OXIDATION;

RAMAN SPECTROSCOPY;

EID: 0038102536     PISSN: 09660941     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (23)

1. J.A. Appels, E. Kooi, M.M. Paffen, J.J.H. Schatorji and W.H.C.G. Verkuylen, Philips Res. Rep. 25, 118 (1970).
2. M. Cardona, SPIE 822, 2 (1987).
3. E.M. Anastassakis, "Morphic effects in lattice dynamics", in Dynamical Properties of Solids, Ed by G.K. Horton and A.A. Maradulin. North-Holland Publishing Company (1980).
4. Th. Englert, G. Absteiter and J. Pontcharra, Solids State Electronics 23, 31 (1980).
5. S. Nakashima, Y. Inoue, M. Miyauchi and A. Mitsuishi, J. Appl. Phys. 54, 2611 (1983).
6. S. Nakashima, Y. Inoue and A. Mitsuishi, J. Appl. Phys. 56, 2989 (1984).
7. S. Kambayashi, T. Hamasaki, T. Nakakubo, M. Watanabe and H. Tango, Extended abstracts of the 18th conference on Solid State Devices and Materials, pp, 415-418 (1986).
8. K. Kobayashi, Y. Inoue, T. Nishimura, T. Nishioka, H. Arima, M. Hiroyama and T. Matsukawa, Extended abstracts of the 19th conference on Solid State Devices and Materials, Tokyo, pp. 323-326 (1987).
9. Y. Inoue, T. Nishimura and Y. Akasaka, Mitsubishi Electric Advance 41, 28 (1987).
10. A. Romano-Rodriguez, J. Vanhellemont, I. De Wolf, H. Norstrom and H.E. Maes, TEM study of LOPOS structures for submicron isolation. Inst. Phys. Conf. Ser. No. 117, Section 4, pp. 165-168 (1991).
11. I. De Wolf, Topical Review, Semicon. Science & Technol. 11(2), 139 (1996).
12. I. De Wolf, H.E. Maes and S.K. Jones, J. Appl. Phys. 79(9), 7148 (1996)
13. I. De Wolf and E. Anastassakis, Addendum, J. Appl. Phys. 85 (10), 7484 (1999).
14. G. Badenes, R. Rooyackers, I. De Wolf and L. Deferm, "Polysilicon encapsulated LOCOS for deep submicron CMOS lateral isolation", Ext. Abstracts of the 1996 Int. Conf. On Solid State Devices and Materials, Yokohama, pp. 46-48 (1996).
15. I. De Wolf, G. Groeseneken, H.E. Maes, M. Bolt, K. Barla, A. Reader and P.J. McNally, Conf. Proc. 24th International Symposium for Testing and Failure Analysis (ISTFA), ASM intn., pp.11-15 (1998).
16. A. Steegen, K. Maex and I. De Wolf, Local mechanical stress induced defects for Ti and Co/Ti silicidation in sub-0.25 μm CMOS technologies. IEEE-VLSI symposium, pp. 200-201 (1998).
17. W.M. and van Spengen, I. De Wolf and R. Knechtel, Proc. SPIE Micromachining and Microfabrication, Sept. 2000.
18. C. Jian and I. De Wolf, Proc. 3th Electronics Packaging Technology Conference (EPTC2000), Singapore (2000).
19. S.M. Hu, J. Appl. Phys. 70(6), (1991).
20. I. De Wolf, D.J. Howard, K. Maex and H.E. Maes, Mat. Res. Soc. Symp. Proc. Vol. 427 (1996).
21. A. Steegen, I. De Wolf and K. Maex, J. Appl. Phys. 86(8), 4290 (1999).
22. I. De Wolf, D.J. Howard, A. Lauwers, K. Maex and H.E. Maes, Appl. Phys. Lett. 70(17), 2262 (1997).
23. I. De Wolf, J. Raman Spectrosc. 30, 877 (1999).