Stability study of a magnesium β-diketonate as precursor for chemical vapor deposition of MgO

Chemistry of Materials

Volumn 23, Issue 5, 2011, Pages 1113-1119

  Sartori, Andrea ^a   El Habra, Naida ^a,b   Bolzan, Marco ^a   Rossetto, Gilberto ^a   Sitran, Sergio ^a   Barreca, Davide ^b   Gasparotto, Alberto ^b   Casarin, Maurizio ^b  

^a CNR   (Italy)

^b UNIVERSITY OF PADOVA   (Italy)

Author keywords

Chemical Vapor Deposition; Precursor Routes to Materials; Structural Characterization

Indexed keywords

CHEMICAL COMPOSITIONS; CVD PROCESS; IN-SITU; IR AND NMR SPECTROSCOPY; LASER REFLECTANCES; MAGNESIUM OXIDES; POLYCRYSTALLINE; PRECURSOR ROUTES; PROCESSING CONDITION; SI(1 0 0); STABILITY STUDY; STRUCTURAL CHARACTERIZATION; SUBLIMATION RATES; TETRAMETHYL; TETRAMETHYLETHYLENEDIAMINE; THERMAL BEHAVIORS; THERMOGRAVIMETRIC MEASUREMENT; VAPOR PHASE;

CHEMICAL STABILITY; DEPOSITION; DEPOSITION RATES; DISSOCIATION; FILM GROWTH; INTERFEROMETRY; MAGNESIUM; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; SUBLIMATION; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

CHEMICAL VAPOR DEPOSITION;

EID: 79952162022     PISSN: 08974756     EISSN: 15205002     Source Type: Journal    
DOI: 10.1021/cm1020788     Document Type: Article

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