Use of a 3C-SiC buffer layer and vicinal substrates for the heteroepitaxial growth of MgO films on Si(001)

Chemical Vapor Deposition

Volumn 8, Issue 6, 2002, Pages 257-259

  Lee, Sun Sook ^a   Lee, Sung Yong ^a   Hyun, Jae Sung ^a   Kim, Chang Gyoun ^a   Kim, Yunsoo ^a  

^a Korea Research Institute of Chemical Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL LATTICES; MAGNESIA; METALLORGANIC CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS; SINGLE CRYSTALS; SPUTTER DEPOSITION; SUBSTRATES;

BUFFER LAYERS; HEXAGONAL PHASES; LATTICE MISMATCH; POLYCRYSTALLINE FILMS;

THIN FILMS;

EID: 0038897229     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-3862(20021203)8:6<257::AID-CVDE257>3.0.CO;2-G     Document Type: Article

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