Preparation of MgO films on GaAs by metalorganic chemical vapor deposition

Materials Letters

Volumn 26, Issue 4-5, 1996, Pages 233-236

  Boo, J H ^a   Yu, K S ^a   Koh, W ^a   Kim, Y ^a  

^a Korea Research Institute of Chemical Technology   (South Korea)

Author keywords

CVD; Gaas substrates; Metalorganic; MgO films

Indexed keywords

FILM PREPARATION; MAGNESIUM; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OXYGEN; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING GALLIUM ARSENIDE; TEMPERATURE; THIN FILMS;

CARRIER GAS; DEPOSITION TEMPERATURE; MAGNESIA FILMS; SUBSTRATE TEMPERATURE;

MAGNESIA;

EID: 0030105740     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0167-577X(95)00227-8     Document Type: Article

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