Growth of magnesium oxide thin films using single molecular precursors by metal-organic chemical vapor deposition

Thin Solid Films

Volumn 341, Issue 1, 1999, Pages 63-67

  Boo, Jin Hyo ^a   Lee, Soon Bo ^a   Yu, Kyu Sang ^b   Koh, Wonyong ^b   Kim, Yunsoo ^b  

^a Sungkyunkwan University   (South Korea)

^b Korea Research Institute of Chemical Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; MAGNESIUM COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SAPPHIRE; SYNTHESIS (CHEMICAL); TEMPERATURE; THIN FILMS;

MAGNESIUM OXIDE THIN FILMS; SINGLE MOLECULAR PORECURSORS;

FILM GROWTH;

EID: 0032641557     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01524-7     Document Type: Article

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