Formation of MgO films by ultrasonic spray pyrolysis from β-diketonate

Thin Solid Films

Volumn 283, Issue 1-2, 1996, Pages 17-25

  Stryckmans, O ^a   Segato, T ^a   Duvigneaud, P H ^a  

^a UNIVERSITÉ LIBRE DE BRUXELLES   (Belgium)

Author keywords

Aluminum oxide; Chemical vapor deposition; Magnesium oxide

Indexed keywords

ALUMINA; ATOMIZATION; CHEMICAL VAPOR DEPOSITION; DECOMPOSITION; DIFFERENTIAL SCANNING CALORIMETRY; INFRARED SPECTROSCOPY; MAGNESIA; MASS SPECTROMETRY; MATHEMATICAL MODELS; PYROLYSIS; THERMOGRAVIMETRIC ANALYSIS; ULTRASONIC APPLICATIONS;

ALUMINA POLYCRYSTALLINE SUBSTRATES; BETA DIKETONATE; MAGNESIUM ACETYLACETONATE; MOLECULE SPLITS; ULTRASONIC SPRAY PYROLYSIS;

FILM PREPARATION;

EID: 0030233247     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(95)08154-2     Document Type: Article

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