Optomechanical transduction of an integrated silicon cantilever probe using a microdisk resonator

Nano Letters

Volumn 11, Issue 2, 2011, Pages 791-797

  Srinivasan, Kartik ^a   Miao, Houxun ^a,b   Rakher, Matthew T ^a   Davanço, Marcelo ^a,b   Aksyuk, Vladimir ^a,c  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

^c UNIVERSITY OF MARYLAND   (United States)

Author keywords

atomic force microscopy; Cavity optomechanics; motion detection; nanomechanics; nanophotonics

Indexed keywords

DISPLACEMENT SENSING; DYNAMIC RANGE; ELECTROSTATIC ACTUATION; HIGH QUALITY FACTORS; MEGAHERTZ FREQUENCIES; MICRO-SCALES; MICRODISK OPTICAL MODE; MICRODISK RESONATORS; MICRODISKS; MOTION DETECTION; NANO SCALE; NANOSCALE DIMENSIONS; OPTICAL TRANSDUCTION; OPTO-MECHANICS; OPTOMECHANICAL; OPTOMECHANICAL SYSTEMS; PROBE TIPS; SILICON CANTILEVER; SPOT SIZES; THERMALLY DRIVEN;

ATOMIC FORCE MICROSCOPY; BACTERIOPHAGES; ELECTROSTATIC ACTUATORS; MAGNETIC RESONANCE; NANOPHOTONICS; NANOSTRUCTURED MATERIALS; PROBES; RESONATORS;

NANOCANTILEVERS;

ARTICLE; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; MECHANICAL STRESS; MICROELECTROMECHANICAL SYSTEM; NANOTECHNOLOGY; OPTICAL INSTRUMENTATION; SYSTEM ANALYSIS; TRANSDUCER;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; NANOTECHNOLOGY; OPTICAL DEVICES; STRESS, MECHANICAL; SYSTEMS INTEGRATION; TRANSDUCERS;

EID: 79851481945     PISSN: 15306984     EISSN: 15306992     Source Type: Journal    
DOI: 10.1021/nl104018r     Document Type: Article

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