A Fabry-Perot interferometer for micrometer-sized cantilevers

Applied Physics Letters

Volumn 86, Issue 7, 2005, Pages 1-3

  Hoogenboom, B W ^a   Frederix, P L T M ^a   Yang, J L ^b,c,d   Martin, S ^b   Pellmont, Y ^b   Steinacher, M ^b   Zach S ^e   Langenbach, E ^e   Heimbeck, H J ^e   Engel, A ^a   Hug, H J ^b,f  

^a UNIVERSITY OF BASEL   (Switzerland)

^b UNIVERSITY OF BASEL   (Switzerland)

^c IBM RESEARCH ZURICH   (Switzerland)

^d INSTITUTE OF SEMICONDUCTORS   (China)

^e R+D FISBA OPTIK AG   (Switzerland)

^f SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; DEFLECTION (STRUCTURES); ELECTRIC MOTORS; LASER BEAMS; MICROELECTROMECHANICAL DEVICES; MICROSCOPIC EXAMINATION; PIEZOELECTRIC DEVICES;

HOMODYNE LASER INTERFEROMETERS; LASER DOPPLER INTERFEROMETERS; MICROMACHANICAL CANTILEVERS; SCANNING FORCE MICROSCOPES (SFM);

FABRY-PEROT INTERFEROMETERS;

EID: 20144387874     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1866229     Document Type: Article

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