Size and frequency dependent gas damping of nanomechanical resonators

Applied Physics Letters

Volumn 93, Issue 1, 2008, Pages

  Verbridge, Scott S ^a   Ilic, Rob ^a,b   Craighead, H G ^a   Parpia, Jeevak M ^a  

^a Cornell University   (United States)

^b Department of Theoretical and Applied Mechanics and the Cornell Nanofabrication Facility   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; ATMOSPHERICS; FLOW INTERACTIONS; RESONATORS;

AMERICAN INSTITUTE OF PHYSICS (AIP); BEAM WIDTHS; FREQUENCY DEPENDENT; FREQUENCY EFFECTS; GAS DAMPING; HIGHER-ORDER MODES; INDIVIDUAL (PSS 544-7); KNUDSEN NUMBERS; NANO BEAMS; NANOMECHANICAL RESONATOR (NAMR); QUALITY FACTOR (Q FACTOR); SURFACE-TO-VOLUME (S/V) RATIO; TRANSITION (JEL CLASSIFICATIONS:E52 ,E41 ,E31);

DAMPING;

EID: 47249109774     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2952762     Document Type: Article

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