Structure and mechanical properties of (TiVCr)N coatings prepared by energetic bombardment sputtering with different nitrogen flow ratios

Journal of Alloys and Compounds

Volumn 509, Issue 6, 2011, Pages 3141-3147

  Tsai, Du Cheng ^a   Huang, Yen Lin ^a   Lin, Sheng Ru ^a   Jung, De Ru ^a   Chang, Shou Yi ^a   Shieu, Fuh Sheng ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Coating materials; Crystal structure; Nitride materials; Thin films; Vapor deposition

Indexed keywords

ALLOY TARGET; BODY-CENTERED CUBIC; COATING MATERIAL; COLUMNAR STRUCTURES; DC BIAS; DENSE STRUCTURES; FACE-CENTERED CUBIC; FACETED SURFACES; FLOW RATIOS; GRAIN SIZE; NITRIDE COATING; NITRIDE MATERIALS; NITROGEN FLOW; PREFERRED ORIENTATIONS; RF-MAGNETRON SPUTTERING; SI SUBSTRATES;

COATINGS; DEPOSITION; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; NITRIDES; PLATING; THIN FILMS; VAPOR DEPOSITION;

CRYSTAL STRUCTURE;

EID: 78651354261     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2010.12.026     Document Type: Article

References (57)

1. H.O. Pierson Handbook of Refractory Carbides and Nitrides 1996 Noyes New Jersey
2. Y. Xi, H. Fan, and W. Liu J. Alloys Compd. 496 2010 695 698
3. A. Kumar, D. Singh, R. Kumar, and D. Kaur J. Alloys Compd. 479 2009 166 172
4. J.L. Ruan, D.F. Lii, H.H. Lu, J.S. Chen, and J.L. Huang J. Alloys Compd. 478 2009 671 675
5. L. Chen, Y. Du, S.Q. Wang, A.J. Wang, and H.H. Xu Mater. Sci. Eng. A 502 2009 139 143
6. Y.C. Chim, X.Z. Ding, X.T. Zeng, and S. Zhang Thin Solid Films 517 2009 4845 4849
7. M. Keunecke, C. Stein, K. Bewilogua, W. Koelker, D. Kassel, and H. van den Berg Surf. Coat. Technol. 205 2010 1273 1278
8. X.Z. Ding, X.T. Zeng, Y.C. Liu, F.Z. Fang, and G.C. Lim Thin Solid Films 516 2008 1710 1715
9. J.T. Chen, J. Wang, F. Zhang, G.A. Zhang, X.Y. Fan, Z.G. Wu, and P.X. Yan J. Alloys Compd. 472 2009 91 96
10. Y. Chunyan, T. Linhai, W. Yinghui, W. Shebin, L. Tianbao, and X. Bingshe Appl. Surf. Sci. 255 2009 4033 4038
11. X. Wang, L.S. Wang, Z.B. Qi, G.H. Yue, Y.Z. Chen, Z.C. Wang, and D.L. Peng J. Alloys Compd. 502 2010 243 249
12. P. Budzynski, J. Sielanko, Z. Surowiec, and P. Tarkowski Vacuum 83 2009 S186 S189
13. D.B. Lee, M.H. Kim, Y.C. Lee, and S.C. Kwon Surf. Coat. Technol. 141 2001 232 239
14. V.M. Vishnyakov, V.I. Bachurin, K.F. Minnebaev, R. Valizadeh, D.G. Teer, J.S. Colligon, V.V. Vishnyakov, and V.E. Yurasova Thin Solid Films 497 2006 189 195
15. Y.W. Lin, J.H. Huang, and G.P. Yu Thin Solid Films 518 2010 7308 7311
16. K.P. Purushotham, L.P. Ward, N. Brack, P.J. Pigram, P. Evans, H. Noorman, and R.R. Manory Wear 254 2003 589 596
17. G. Abadias, L.E. Koutsokeras, S.N. Dub, G.N. Tolmachova, A. Debelle, and T. Sauvage J. Vac. Sci. Technol. A 28 2010 541 551
18. S.M. Kim, B.S. Kim, G.S. Kim, S.Y. Lee, and B.Y. Lee Surf. Coat. Technol. 202 2008 5521 5525
19. J.W. Yeh, S.K. Chen, S.J. Lin, J.Y. Gan, T.S. Chin, T.T. Shun, C.H. Tsau, and S.Y. Chang Adv. Eng. Mater. 6 2004 299 303
20. P.K. Huang, J.W. Yeh, T.T. Shun, and S.K. Chen Adv. Eng. Mater. 6 2004 74 78
21. C.J. Tong, M.R. Chen, S.K. Chen, J.W. Yeh, T.T. Shun, S.J. Lin, and S.Y. Chang Metall. Mater. Trans. A 36A 2005 1263 1271
22. C.J. Tong, Y.L. Chen, S.K. Chen, J.W. Yeh, T.T. Shun, C.H. Tsau, S.J. Lin, and S.Y. Chang Metall. Mater. Trans. A 36A 2005 881 893
23. C. Li, J.C. Li, M. Zhao, and Q. Jiang J. Alloys Compd. 504S 2010 S515 S518
24. B.S. Li, Y.P. Wang, M.X. Ren, C. Yang, and H.Z. Fu Mater. Sci. Eng. A 498 2008 482 486
25. F.J. Wang, Y. Zhang, and G.L. Chen J. Alloys Compd. 478 2009 321 324
26. T.T. Shun, C.H. Hung, and C.F. Lee J. Alloys Compd. 493 2010 105 109
27. D.C. Tsai, Y.L. Huang, S.R. Lin, S.C. Liang, and F.S. Shieu Appl. Surf. Sci. 257 2010 1361 1367
28. S.Y. Chang, S.Y. Lin, Y.C. Huang, and C.L. Wu Surf. Coat. Technol. 204 2010 3307 3314
29. P.K. Huang, and J.W. Yeh Surf. Coat. Technol. 203 2009 1891 1896
30. M. Braic, V. Braic, M. Balaceanu, C.N. Zoita, A. Vladescu, and E. Grigore Surf. Coat. Technol. 204 2010 2010 2014
31. D.C. Tsai, F.S. Shieu, S.Y. Chang, H.C. Yao, and M.J. Deng J. Electrochem. Soc. 157 2010 K52 K58
32. H.P. Klug, and L.E. Alexander X-ray Diffraction Procedures for Polycrystalline and Amorphous Materials 1974 Wiley & Sons New York
33. N. Laegreid, and G.K. Wehner J. Appl. Phys. 32 1961 365 369
34. K.N. Melton Engineering Aspects of Shape Memory Alloys 1990 Butterworth-Heinemann London
35. L.F. Donaghey, and L.G. Geraghty Thin Solid Films 38 1976 271 280
36. M. Yoshitake, K. Takiguchi, Y. Suzuki, and S. Ogawa J. Vac. Sci. Technol. A 6 1988 2326 2332
37. R.M. Mason, and M. Pichiling J. Phys. D: Appl. Phys. 27 1994 2363 2371
38. A.J. Maeland, G.G. Libowitz, and J.F. Lynch J. Less Common Met. 104 1984 361 364
39. S.W. Cho, C.N. Park, J.H. Yoo, J. Choi, J.S. Park, C.Y. Suh, and G. Shim J. Alloys Compd. 403 2005 262 266
40. M. Uchida, N. Nihira, A. Mitsuo, K. Toyoda, K. Kubota, and T. Aizawa Surf. Coat. Technol. 177-178 2004 627 630
41. H. Hasegawa, A. Kimura, and T. Suzuki J. Vac. Sci. Technol. A 18 2000 1038 1040
42. J. Musil, and H. Polkov Surf. Coat. Technol. 127 2000 99 106
43. M. Lu, J.H. Judy, and J.M. Sivertsen IEEE Trans. Magn. 26 1990 1581 1583
44. J.E. Greene, J.-E. Sundgren, L. Hultman, I. Petrov, and D.B. Bergstrom Appl. Phys. Lett. 67 1995 2928 2930
45. L. Hultman, J.-E. Sundgren, J.E. Greene, D.B. Bergstrom, and I. Petrov J. Appl. Phys. 78 1995 5395 5403
46. D. Gall, S. Kodambaka, M.A. Wall, I. Petrov, and J.E. Greene J. Appl. Phys. 93 2003 9086 9094
47. J. Pelleg, L.Z. Zevin, S. Lungo, and N. Croitoru Thin Solid Films 197 1991 117 128
48. S. Mahieu, P. Ghekiere, G.D. Winter, R.D. Gryse, D. Depla, G.V. Tendeloo, and O.I. Lebedev Surf. Coat. Technol. 200 2006 2764 2768
49. H.C. Yao, M.C. Chiu, W.T. Wu, and F.S. Shieu J. Electrochem. Soc. 153 2006 F237 F243
50. K.J. Martin, A. Madan, D. Hoffman, J. Ji, and S.A. Barnett J. Vac. Sci. Technol. A 23 2005 90 98
51. J.C. Lin, G. Chen, and C. Lee J. Electrochem. Soc. 146 1999 1835 1839
52. S.H. Kim, Y.L. Choi, Y.S. Song, D.Y. Lee, and S.J. Lee Mater. Lett. 57 2002 343 348
53. A. van der Drift Philips Res. Rep. 22 1967 267 288
54. E. Blando, and R. Hubler Surf. Coat. Technol. 158-159 2002 685 689
55. H.S. Chou, J.C. Huang, L.W. Chang, and T.G. Nieh Appl. Phys. Lett. 93 2008 191901-1-1191901
56. J. Hampshire, P.J. Kelly, and D.G. Teer Thin Solid Films 447-448 2004 392 398
57. C.K. Chung, and T.S. Chen J. Mater. Res. 23 2008 494 499