Oxidation resistance of TiN, CrN, TiAlN and CrAlN coatings deposited by lateral rotating cathode arc

Thin Solid Films

Volumn 517, Issue 17, 2009, Pages 4845-4849

  Chim, Y C ^a   Ding, X Z ^b   Zeng, X T ^b   Zhang, S ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

Crystalline structure; Hardness; Lateral rotating cathode arc; Nitride coatings; Oxidation resistance

Indexed keywords

AMBIENT ATMOSPHERE; ANNEALING TEMPERATURES; ATOMIC RATIO; CHEMICAL COMPOSITIONS; CRN COATING; CRYSTALLINE STRUCTURE; DEPOSITED COATINGS; DRY MACHINING; ENERGY DISPERSIVE X RAY SPECTROSCOPY; HIGH-TEMPERATURE ENVIRONMENT; HIGHER TEMPERATURES; LATERAL ROTATING CATHODE ARC; NANOINDENTATION EXPERIMENTS; NITRIDE COATINGS; OTHER APPLICATIONS; OXIDATION BEHAVIOURS; OXIDATION RATES; ROTATING CATHODE; STAINLESS STEEL SUBSTRATES; TIN COATING;

ANNEALING; ATMOSPHERIC TEMPERATURE; CAVITY RESONATORS; CHROMATE COATINGS; CHROMIUM; CRYSTALLINE MATERIALS; HARDNESS; HIGH TEMPERATURE APPLICATIONS; INORGANIC COATINGS; NITRIDES; OXIDATION; OXIDATION RESISTANCE; OXYGEN; ROTATION; STAINLESS STEEL; SUBSTRATES; TITANIUM COMPOUNDS; TITANIUM NITRIDE; X RAY DIFFRACTION;

HARD COATINGS;

EID: 65649090646     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.03.038     Document Type: Article

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