MEMS design and fabrication of an electrostatic vibration-to-electricity energy converter

Microsystem Technologies

Volumn 13, Issue 11-12, 2007, Pages 1663-1669

  Chiu, Yi ^a   Kuo, Chiung Ting ^a   Chu, Yu Shan ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; ELECTROSTATIC DEVICES; MEMS; MICROFABRICATION; SILICON ON INSULATOR TECHNOLOGY;

CHIP AREA CONSTRAINTS; ELECTROSTATIC CONVERTERS; SIMULINK SIMULATION;

ELECTRIC CONVERTERS;

EID: 34249826663     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0348-z     Document Type: Conference Paper

References (7)

1. Chu YS, Kuo CT, Chiu Y (2005) A MEMS electrostatic vibration-to- electricity energy converter. In: Proceedings of PowerMEMS, pp 49-52
2. Douseki T, Yoshida Y, Utsunomiya F, Ito N, Hama N (2003) A batteryless wireless system uses ambient heat with a reversible-power-source compatible CMOS/SOI DC-DC converter. In: Proceedings of the IEEE international solid-state circuits conference, pp 388-389
3. Lal A, Duggirala R, Li H (2005) Pervasive power: a radioisotope-powered piezoelectric generator. IEEE Pervasive Comput 04(1):53-61
4. Rabaey JM, Ammer MJ, da Silva JL Jr, Patel D, Roundy S (2000) Picoradio supports ad hoc ultra low-power wireless networking. IEEE Comput Mag 33:42-48
5. Roundy S, Wright PK, Pister KS (2002) Micro-electrostatic vibration-to-electricity converters. In: Proceedings of 2002 ASME International Mechanical Engineering Congress and Exposition, pp 393-409
6. Tashiro R, Kabei N, Katayama K, Ishizuka Y, Tsuboi F, Tsuchiya K (2000) Development of an electrostatic generator that harnesses the motion of a living body: (use of a resonant phenomenon). JSME Int J ser C 43(4):916-922
7. Williams CB, Yates RB (1996) Analysis of micro-electric generator for microsystems. Sensors Actuators A 52:8-11.