Rotary electrostatic micromirror switches using wafer-scale processing and assembly

Microsystem Technologies

Volumn 12, Issue 12, 2006, Pages 1099-1108

  Tu, Ching Chen ^a   Fanchiang, Kuohao ^a   Liu, Cheng Hsien ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ASSEMBLY; LIGHT REFLECTION; MICROELECTROMECHANICAL DEVICES; MIRRORS; NATURAL FREQUENCIES;

DYNAMIC WARPING; MICROMIRROR SWITCHES; SPIN-ON-GLASS; WAFER-SCALE PROCESSING;

OPTICAL SWITCHES;

EID: 33748780389     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0167-2     Document Type: Article

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