Fabrication, characterization and modelling of electrostatic micro-generators

Journal of Micromechanics and Microengineering

Volumn 19, Issue 9, 2009, Pages

  Hoffmann, Daniel ^a   Folkmer, Bernd ^a   Manoli, Yiannos ^a,b  

^a Institute for Micromachining and Information Technology   (Germany)

^b UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AVERAGE POWER; CHIP SIZES; DYNAMIC BEHAVIOURS; ELECTRICAL DOMAINS; ELECTRICAL ENERGY; ELECTROSTATIC ENERGIES; ELECTROSTATIC TRANSDUCERS; FLOW MODEL; INERTIAL SENSOR; LONG-TERM EXPERIMENTS; MICROGENERATORS; NET ENERGY; NUMERICAL MODELS; NUMERICAL SIMULATION; PROOF MASS; RESONANCE FREQUENCIES; SOI TECHNOLOGY; SYSTEM LEVELS;

ELECTROSTATIC FORCE; FLOW SIMULATION; MATHEMATICAL MODELS; RESONANCE; SILICON ON INSULATOR TECHNOLOGY; SIMULATORS;

ELECTROSTATIC GENERATORS;

EID: 70350686621     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/9/094001     Document Type: Article

References (19)

1. Trimmer W S N 1989 Microrobots and micromechanical systems Sensors Actuators 19 267-87
2. Sterken T, Baert K, Van Hoof C, Puers R, Borghs G and Fiorini P 2004 Comparative modelling for vibration scavengers Sensors Proc. IEEE 3 1249-52
3. Mitcheson P D, Sterken T, He C, Kiziroglou M, Yeatman E M and Puerso R 2008 Electrostatic microgenerators Meas. Control 41 114-9
4. Hoffmann D, Folkmer B and Manoli Y 2007 Design considerations of electrostatic electrode elements for in-plane micro-generators Technical Digest PowerMEMS 2007 (Freiburg, Germany, November 2007) pp 133-6
5. Breaux O P 1976 US Patent US04127804
6. Williams C B and Yates R B 1995 Analysis of a micro-electric generator for microsystems Proc. Transducers/Eurosensors 1995 (Stockholm, Sweden, June 1995) vol 1 pp 369-72
7. Mitcheson P D, Yeatman E M, Rao G K, Holmes A S and Green T C 2008 Energy harvesting from human and machine motion for wireless electronic devices Proc. IEEE 96 1457-86
8. Tsutsumino T, Suzuki Y, Kasagi N and Sakane Y 2006 Seismic power generator using high-performance polymer electret Proc. MEMS 2006 (Istanbul, Turkey, January 2006) pp 98-101
9. Tsutsumino T, Suzuki Y, Kasagi N, Kashiwagi K and Morizawa Y 2006 Micro seismic electret generator for energy harvesting Technical Digest PowerMEMS 2006 (Berkeley, USA, November 2006) pp 133-136
10. Sterken T, Altena G, Fiorini P and Puers R 2007 Characterisation of an electrostatic vibration harvester DTIP of MEMS & MOEMS (Stresa, Italy, April 2007)
11. Sterken T, Baert K, Puers R and Borghs S 2002 Power extraction from ambient vibration Proc. SeSens (Workshop on Semiconductor Sensors, Veldhoven, The Netherlands, November 2002) pp 680-83
12. Miao P, Mitcheson P D, Holmes A S, Yeatman E M, Green T C and Stark B H 2005 MEMS inertial power generators for biomedical applications DTIP of MEMS & MOEMS (Montreux, Switzerland, June 2005)
13. Naruse Y, Matsubara N, Mabuchi K, Izumi M and Honma K 2008 Electrostatic micro power generator from low frequency vibration such as human motion Technical Digest PowerMEMS 2008 (Sendai, Japan, November 2008) pp 19-22
14. Sterken T, Baert K, Puers R, Borghs G and Mertens R 2003 A new power MEMS component with variable capacitance Proc. Pan Pacific Microelectronics Symp. (HI, USA, February 2003) pp 27-34
15. www.spectrum-semi.com - ref-separator -
16. Sterken T, Fiorini P, Baert K, Borghs G and Puers R 2004 Novel design and fabrication of a MEMS electrostatic vibration scavenger Proc. PowerMEMS 2004 (Kyoto, Japan, November 2004) pp. 18-21
17. Tvedt L G W, Blystad L J and Halvorsen E 2008 Simulation of an electrostatic energy harvester at large amplitude narrow and wide band vibration DTIP of MEMS & MOEMS (French Riviera, France, April 2008)
18. Gormley C, Yallup K and Nevin W A 1999 State of the art deep silicon anisotropic etching on SOI bonded substrates for dielectric isolation and MEMS applications Proc. Tech. Dig. 5th Int. Symp. Semiconductor Wafer Bonding (Honolulu, HI, October 1999) pp 350-361
19. Soliman M S M, Abdel-Rahman E M, El-Saadany E F and Mansour R R 2008 A wideband vibration-based energy harvester J. Micromech. Microeng. 18 115021