Parylene-based electret power generators

Journal of Micromechanics and Microengineering

Volumn 18, Issue 10, 2008, Pages

  Lo, Hsi Wen ^a   Tai, Yu Chong ^a  

^a California Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

THIN FILM DEVICES;

CONFORMAL COATINGS; CONTROLLING STRUCTURES; CORONA CHARGES; EXTERNAL LOADS; HIGH TEMPERATURES; LOW FREQUENCIES; MAXIMUM POWER OUTPUTS; NEW DESIGNS; PARYLENE; POWER GENERATORS; SURFACE CHARGE DENSITIES;

ELECTRETS;

EID: 58149376401     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/10/104006     Document Type: Article

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