Power MEMS-A capacitive vibration-to-electrical energy converter with built-in voltage

Sensors and Actuators, A: Physical

Volumn 142, Issue 1, 2008, Pages 263-269

  Kuehne, Ingo ^a   Frey, Alexander ^a   Marinkovic, Djordje ^a   Eckstein, Gerald ^a   Seidel, Helmut ^b  

^a SIEMENS AG   (Germany)

^b SAARLAND UNIVERSITY   (Germany)

Author keywords

Built in voltage; Capacitive energy conversion; Energy converter; Power MEMS; Vibration to electrical conversion

Indexed keywords

COMPUTER SIMULATION; ELECTROSTATIC DEVICES; MEMS; OPTIMIZATION; POWER ELECTRONICS; VIBRATION ANALYSIS;

BUILT-IN VOLTAGE; CAPACITIVE ENERGY CONVERSION; PROCESS FLOW; VIBRATION-TO-ELECTRICAL CONVERSION;

ENERGY CONVERSION;

EID: 38849206825     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.02.036     Document Type: Article

References (19)

1. Schmidt F. Wartungsfreie Funksensoren für Gebäudetechnik, Industrie und Automobiltechnik. Proceedings of the Fifth Wireless Technologies Congress. Sindelfingen, Germany (2003)
2. J.O. Miranda, Electrostatic vibration-to-electric energy conversion, Dissertation, Massachusetts Institute of Technology at Boston, 2004.
3. Cai W. Vibration measurements in the switched reluctance motor. Proceedings of the Industry Applications Conference. Chicago, USA (2001)
4. Agah M., Baek K., and Potkay J.A. Design and Analysis of a Piezoelectric Vibration Powered MicroGenerator System (2002), University of Michigan College of Engineering, Electrical Engineering and Computer Science
5. Lu F., Lee H.P., and Lim S.P. Modeling and analysis of micro piezoelectric power generators for micro-electromechanical-systems applications. Smart Mater. Struct. 13 (2004) 57-63
6. Roundy J.S., Leland E.S., Baker J., Carleton E., Reilly E., and Lai E. Improving power output for vibration-based energy scavengers. Pervasive Comput. 4 (2005) 28-36
7. Ramsey M.J., and Clark W.W. Piezoelectric energy harvesting for Bio MEMS applications. Proc. SPIE 4332 (2001) 429-438
8. Sterken T., Baert K., Puers R., and Borghs S. Power extraction from ambient vibration. Proceedings of SeSens (Workshop on Semiconductor Sensors). Veldhoven, The Netherlands (2002) 680-683
9. Peano F., and Tambosso T. Design and optimization of a MEMS electret-based capacitive energy scavenger. J. Micromech. Microeng. 14 (2005) 429-435
10. Mizuno M., and Chewtwynd D.G. Investigation of a resonance microgenerator. J. Micromech. Microeng. 13 (2003) 209-216
11. Lee M.H., Yuen C.L., Li W.J., and Leong H.W. Development of an AA size energy transducer with micro resonators, ISCAS'03. Proceedings of the International Symposium on Circuits and Systems (2003)
12. Ching N.H., Wong H.Y., Li W.J., Leong H.W., and Wen Z. A laser-micromachined vibrational to electrical power transducer for wireless sensing systems. Proceedings of the 11th International Conference on Solid-state Sensors and Actuator. Munich, Germany (2001)
13. Williams C.B., Shearwood C., Harradine M.A., Mellor P.H., Birch T.S., and Yates R.B. Development of an electromagnetic micro-generator. IEE Proc. Circ. Dev. Syst. 148 (2001)
14. J.S. Roundy, Energy scavenging for wireless sensor nodes with a focus on vibration to electricity conversion, Dissertation, University of California at Berkeley, 2003.
15. Sterken T., Baert K., Puers R., Borghs G., and Mertens R. A new power MEMS component with variable capacitance. Pan Pacific Microelectronic Symposium. Hawaii (2003) 27-34
16. Arakawa J., Suzuki Y., and Kasagi N. Micro seismic power generator using electret polymer film. Proceedings of the Fourth International Workshop on Micro- and Nanotechnology for Power Generation and Energy Conversion Applications. Japan (2004) 187-190
17. Tipler P.A., and Llewellyn R.A. Modern Physics. 3rd. ed. (1999), W.H. Freeman, New York
18. Ammar Y., Buhrig A., Marzencki M., Charlot B., Basrour S., Matou K., and Renaudin M. Wireless sensor network node with asynchronous architecture and vibration harvesting micro power generator. Proceedings of the Oc-EUSAI Conference. Grenoble, France, October 12-14 (2005)
19. Ottmann G., Hofmann H., Bhatt A., and Lesieutre G. Adaptive piezoelectric energy harvesting circuit for wireless remote power supply. IEEE Trans. Power Electron. 17 (2002) 669-676