Characterization and optimization of polycrystalline Si 70%Ge30% for surface micromachined thermopiles in human body applications

Journal of Micromechanics and Microengineering

Volumn 19, Issue 9, 2009, Pages

  Wang, Ziyang ^a,b   Fiorini, Paolo ^a   Leonov, Vladimir ^a   Van Hoof, Chris ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

COMPARATIVE ADVANTAGE; ELECTRICAL RESISTIVITY; FIGURE OF MERIT; HUMAN BODIES; IN-SITU DOPING; MATERIAL CHARACTERIZATIONS; MATERIAL PROPERTY; MICROMACHINED; NOVEL SURFACES; OPTIMAL DESIGN; OPTIMIZATION SCHEME; POLY-SIGE; POLYCRYSTALLINE-SI; RAPID THERMAL CHEMICAL VAPOR DEPOSITIONS; SPECIFIC CONTACT RESISTANCES; TEST STRUCTURE; THERMOELECTRIC GENERATORS;

CHEMICAL VAPOR DEPOSITION; CONTACT RESISTANCE; DESIGN; ELECTRIC BATTERIES; ELECTRIC CONDUCTIVITY; GERMANIUM; ION BOMBARDMENT; ION IMPLANTATION; MATERIALS; OPTIMIZATION; SEEBECK COEFFICIENT; SEMICONDUCTING GERMANIUM COMPOUNDS; SILICON ALLOYS; SURFACE STRUCTURE; TERNARY SYSTEMS; THERMAL CONDUCTIVITY; THERMOANALYSIS; THERMOELECTRIC EQUIPMENT; THERMOPILES;

POLYSILICON;

EID: 70350639467     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/9/094011     Document Type: Article

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