Design and fabrication of MEMS thermoelectric generators with high temperature efficiency

Sensors and Actuators, A: Physical

Volumn 145-146, Issue 1-2, 2008, Pages 423-429

  Huesgen, Till ^a   Woias, Peter ^a   Kockmann, Norbert ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Energy harvesting; Seebeck effect; Thermoelectric generator; Thermopiles

Indexed keywords

ARCHITECTURAL DESIGN; COMPOSITE MICROMECHANICS; COPPER PLATING; DIRECT ENERGY CONVERSION; ELECTRIC POWER FACTOR; ELECTRIC POWER UTILIZATION; ELECTROCHEMICAL SENSORS; ELECTROPLATING; ENERGY CONVERSION; ENERGY EFFICIENCY; HEAT STORAGE; MEMS; MICROANALYSIS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SOLAR EQUIPMENT; SURFACE PROPERTIES; SURFACES; THERMAL EFFECTS; THERMOCOUPLES; THERMOELECTRIC EQUIPMENT; THERMOELECTRICITY; THERMOMETERS;

BULK MICRO-MACHINING; CHIP SURFACES; COMBINED SURFACE; CONTACT AREAS; ENERGY HARVESTING; HEAT FLOW PATH; HEAT SOURCING; HIGH INTEGRATION DENSITY; HIGH TEMPERATURE (HT); MEMS DEVICES; POWER CONSUMPTION (CE); POWER FACTOR (PF); POWER SUPPLIES; TEMPERATURE DIFFERENCES; WAFER SURFACES;

ENERGY RESOURCES;

EID: 44849121990     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.11.032     Document Type: Article

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