A capacitive vibration-to-electricity energy converter with integrated mechanical switches

Journal of Micromechanics and Microengineering

Volumn 18, Issue 10, 2008, Pages

  Chiu, Y ^a   Tseng, V F G ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY CONVERSION; FABRICATION; HETEROJUNCTION BIPOLAR TRANSISTORS; NATURAL FREQUENCIES; SEMICONDUCTING SILICON COMPOUNDS; SILICON ON INSULATOR TECHNOLOGY; VIBRATIONS (MECHANICAL);

BATTERY SUPPLIES; CIRCUIT MODELING; DEEP SILICON ETCHINGS; DEVICE AREAS; ELECTRONIC DEVICES; ENERGY CONVERTERS; EXPECTED VALUES; EXTERNAL-; FABRICATED DEVICES; INPUT VIBRATIONS; LOW POWERS; MECHANICAL CONTACTS; MECHANICAL SWITCHES; OUTPUT POWERS; OUTPUT SATURATIONS; PARASITIC CAPACITANCES; RESONANT FREQUENCIES; SILICON ON INSULATORS; SUBSTRATE REMOVALS; VLSI DESIGNS;

SILICON WAFERS;

EID: 58149354159     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/10/104004     Document Type: Article

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