Low-frequency two-dimensional resonators for vibrational micro energy harvesting

Journal of Micromechanics and Microengineering

Volumn 20, Issue 3, 2010, Pages

  Bartsch, U ^a   Gaspar, J ^a   Paul, O ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT PRESSURES; CUBIC CRYSTAL; EIGEN MODES; ELASTIC ANISOTROPY; FABRICATION PROCESS; FREQUENCY SPLITTINGS; GEOMETRICAL IMPERFECTIONS; ISOTROPIC MODELS; LOW FREQUENCY; MICRO ENERGY; MODE SPLITTING; NUMERICAL RESULTS; QUALITY FACTORS; RESONANCE FREQUENCIES; RESONATOR DESIGN; SEISMIC MASS; SILICON RESONATORS; SINGLE ETCH; THREEFOLD ROTATIONAL SYMMETRY; WAFER THICKNESS;

ANISOTROPY; DYNAMIC RESPONSE; HARVESTING; HUMAN COMPUTER INTERACTION; NATURAL FREQUENCIES; NUMERICAL ANALYSIS; REACTIVE ION ETCHING; RESONATORS; SILICON WAFERS; TWO DIMENSIONAL;

ENERGY HARVESTING;

EID: 77749321118     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/3/035016     Document Type: Article

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