Precise electrochemical fabrication of sub-20 nm solid-state nanopores for single-molecule biosensing

Journal of Physics Condensed Matter

Volumn 22, Issue 45, 2010, Pages

  Ayub, Mariam ^a   Ivanov, Aleksandar ^a   Hong, Jongin ^a   Kuhn, Phillip ^a,b   Instuli, Emanuele ^a   Edel, Joshua B ^a   Albrecht, Tim ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTE MOLECULES; BIOMOLECULE ANALYSIS; BIOSENSING; ELECTROCHEMICAL FABRICATION; ELECTRODEPOSITION PROCESS; FABRICATION COST; FABRICATION METHOD; FABRICATION PROCESS; HIGHLY SENSITIVE; IONIC CURRENT; MEMBRANE ELECTRODES; NANO METER RANGE; NANO-METER-SCALE; NANOPORE ARRAY; NANOPORE MEMBRANES; NANOPORE SIZE; PORE DIAMETERS; POTENTIOSTATICS; PROOF OF CONCEPT; SEMI-CONDUCTOR FABRICATION; SINGLE-MOLECULE; SOLID-STATE NANOPORE; STABLE MEMBRANES;

BIOMOLECULES; CHEMICAL SENSORS; ELECTRODEPOSITION; FABRICATION; ION BEAMS; MOLECULES; PLATINUM; RNA; SOLID-STATE SENSORS; STRUCTURAL ANALYSIS; SURFACE PROPERTIES; TRANSMISSION ELECTRON MICROSCOPY;

NANOPORES;

NANOMATERIAL;

ARTICLE; CHEMISTRY; ELECTROPLATING INDUSTRY; EQUIPMENT; EQUIPMENT DESIGN; GENETIC PROCEDURES; INSTRUMENTATION; POROSITY; ULTRASTRUCTURE;

BIOSENSING TECHNIQUES; ELECTROPLATING; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MOLECULAR PROBE TECHNIQUES; NANOSTRUCTURES; POROSITY;

EID: 78149431654     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/22/45/454128     Document Type: Article

References (61)

1. Ai Y et al 2010 Effects of electroosmotic flow on ionic current rectification in conical nanopores J. Phys. Chem. C 114 3883-90
2. Apel P Y et al 2001 Diode-like single-ion track membrane prepared by electro-stopping Nucl. Instrum. Methods Phys. Res. B 184 337-46
3. Ayub M, Ivanov A, Instuli E, Cecchini M, Chansin G, McGilvery C, Hong J, Baldwin G, McComb D, Edel J B and Albrecht T 2010 Nanopore/electrode structures for single-molecule biosensing Electrochim. Acta 55 8237-43
4. Branton D et al 2008 The potential and challenges of nanopore sequencing Nat. Biotechnol. 26 1146-53
5. Chang H et al 2006 Fabrication and characterization of solid-state nanopores using a field emission scanning electron microscope Appl. Phys. Lett. 88 103109
6. Chansin G A T et al 2007 Single-molecule spectroscopy using nanoporous membranes Nano Lett. 7 2901-6
7. Chen P et al 2004a Probing single DNA molecule transport using fabricated nanopores Nano Lett. 4 2293-8
8. Chen P et al 2004b Atomic layer deposition to fine-tune the surface properties and diameters of fabricated nanopores Nano Lett. 4 1333-7
9. Cole R M et al 2009 Engineering SERS via absorption control in novel hybrid Ni/Au nanovoids Opt. Express 17 13298-308
10. Deamer D W and Akeson M 2000 Nanopores and nucleic acids: prospects for ultrarapid sequencing Trends Biotechnol. 18 147-51
11. Deamer D W and Branton D 2002 Characterization of nucleic acids by nanopore analysis Acc. Chem. Res. 35 817-25
12. Dekker C 2007 Solid-state nanopores Nat. Nanotechnol. 2 209-15
13. Demers L M et al 2002 Thermal desorption behavior and binding properties of DNA bases and nucleosides on gold J. Am. Chem. Soc. 124 11248-9
14. Dimitrov V et al 2010 Nanopores in solid-state membranes engineered for single molecule detection Nanotechnology 21 065502
15. Ervin E N et al 2008 Simultaneous alternating and direct current readout of protein ion channel blocking events using glass nanopore membranes Anal. Chem. 80 2069-76
16. Fischbein M D and Drndic M 2007 Sub-10nm device fabrication in a transmission electron microscope Nano Lett. 7 1329-37
17. Gracheva M E et al 2006 Simulation of the electric response of DNA translocation through a semiconductor nanopore-capacitor Nanotechnology 17 622-33
18. Gracheva M E et al 2007 p-n semiconductor membrane for electrically tunable ion current rectification and filtering Nano Lett. 7 1717-22
19. Harrell C C et al 2006 Conical nanopore membranes: controlling the nanopore shape Small 2 194-98
20. Hong J et al 2008 Design of a solid-state nanopore-based platform for single-molecule spectroscopy Nanotechnology 19 165205
21. Howorka S et al 2001 Sequence-specific detection of individual DNA strands using engineered nanopores Nat. Biotechnol. 19 636-9
22. Ives D J G and Janz G J (ed) 1961 Reference Electrodes, Theory and Practice (New York: Academic Press)
23. Kasianowicz J J et al 1996 Characterization of individual polynucleotide molecules using a membrane channel Proc. Natl Acad. Sci. USA 93 13770-3
24. Kasianowicz J J et al 2008 Nanoscopic porous sensors Annu. Rev. Anal. Chem. 1 737-66
25. Kim M J et al 2006 Rapid fabrication of uniformly sized nanopores and nanopore arrays for parallel DNA analysis Adv. Mater. 18 3149
26. Kim M J et al 2007a Characteristics of solid-state nanometre pores fabricated using a transmission electron microscope Nanotechnology 18 205302
27. Kim Y R et al 2007b Nanopore sensor for fast label-free detection of short double-stranded DNAs Biosens. Bioelectron. 22 2926-31
28. Kovarik M L et al 2009 Effect of conical nanopore diameter on ion current rectification J. Phys. Chem. B 113 15960-6
29. Li J et al 2001 Ion-beam sculpting at nanometre length scales Nature 412 166-9
30. Lo C J et al 2006 Fabrication of symmetric sub-5 nm nanopores using focused ion and electron beams Nanotechnology 17 3264-7
31. Meller A and Branton D 2002 Single molecule measurements of DNA transport through a nanopore Electrophoresis 23 2583-91
32. Meller A et al 2000 Rapid nanopore discrimination between single polynucleotide molecules Proc. Natl Acad. Sci. USA 97 1079-84
33. Mussi V et al 2010 DNA-functionalized solid state nanopore for biosensing Nanotechnology 21 145102
34. Nagoshi K et al 2009 Direct fabrication of nanopores in a metal foil using focused ion beam with in situ measurements of the penetrating ion beam current Rev. Sci. Instrum. 80 125102
35. Nilsson J et al 2006 Localized functionalization of single nanopores Adv. Mater. 18 427
36. Nishizawa M et al 1995 Metal nanotubule membranes with electrochemically switchable ion-transport selectivity Science 268 700-2
37. Park S R et al 2007 Fabrication of nanopores in silicon chips using feedback chemical etching Small 3 116-9
38. Patterson N, Carter H V, Vasile M J, Adams D P, Chen Z and Brinker C J 2007 Direct Focused Ion Beam Drilling of Nanopores (Warrendale, PA: Materials Research Society Meeting)
39. Patterson N et al 2008 Controlled fabrication of nanopores using a direct focused ion beam approach with back face particle detection Nanotechnology 19 235304
40. Petrossian L et al 2007 Fabrication of cylindrical nanopores and nanopore arrays in silicon-on-insulator substrates J. Microelectromech. Syst. 16 1419-28 (Pubitemid 350239135)
41. Polk B J et al 2004 Microelectroplating silver on sharp edges toward the fabrication of solid-state nanopores J. Electrochem. Soc. 151 C559-66
42. Ramirez P et al 2003 Synthetic nanopores with fixed charges: an electrodiffusion model for ionic transport Phys. Rev. E 68 011910
43. Schenkel T et al 2003 Formation of a few nanometer wide holes in membranes with a dual beam focused ion beam system J. Vac. Sci. Technol. B 21 2720-3
44. Schiedt B et al 2010 Direct FIB fabrication and integration of 'single nanopore devices' for the manipulation of macromolecules Microelectron. Eng. 87 1300-3
45. Shim J H et al 2007 Glass nanopore-based ion-selective electrodes Anal. Chem. 79 3568-74
46. Sigalov G et al 2008 Detection of DNA sequences using an alternating electric field in a nanopore capacitor Nano Lett. 8 56-63
47. Siwy Z and Fulinski A 2004 A nanodevice for rectification and pumping ions Am. J. Phys. 72 567-74
48. Siwy Z S and Howorka S 2010 Engineered voltage-responsive nanopores Chem. Soc. Rev. 39 1115-32
49. Smeets R M M et al 2006 Salt dependence of ion transport and DNA translocation through solid-state nanopores Nano Lett. 6 89-95
50. Soni G V et al 2010 Synchronous optical and electrical detection of biomolecules traversing through solid-state nanopores Rev. Sci. Instrum. 81 014301
51. Storm A J et al 2003 Fabrication of solid-state nanopores with single-nanometre precision Nat. Mater. 2 537-40
52. Storm A J et al 2005 Translocation of double-strand DNA through a silicon oxide nanopore Phys. Rev. E 71 051903
53. Venkatesan B M et al 2009 Highly sensitive, mechanically stable nanopore sensors for DNA analysis Adv. Mater. 21 2771
54. 2 nanopore sensors Adv. Funct. Mater. 20 1266-75
55. Vlassiouk I et al 2009 Versatile ultrathin nanoporous silicon nitride membranes Proc. Natl Acad. Sci. USA 106 21039-44
56. Wang G L et al 2006 Electrostatic-gated transport in chemically modified glass nanopore electrodes J. Am. Chem. Soc. 128 7679-86
57. Wanunu M and Meller A 2007 Chemically modified solid-state nanopores Nano Lett. 7 1580-5
58. Wanunu M et al 2008 DNA translocation governed by interactions with solid-state nanopores Biophys. J. 95 4716-25
59. White R J et al 2007 Single ion-channel recordings using glass nanopore membranes J. Am. Chem. Soc. 129 11766-75
60. 2 membrane with an electron beam Appl. Phys. Lett. 87 113106
61. Zhang B et al 2007 Bench-top method for fabricating glass-sealed nanodisk electrodes, glass nanopore electrodes, and glass nanopore membranes of controlled size Anal. Chem. 79 4778-87