SCOPUS 정보 검색 플랫폼

Volumn 80, Issue 12, 2009, Pages

Direct fabrication of nanopores in a metal foil using focused ion beam with in situ measurements of the penetrating ion beam current

(5) Nagoshi, Kotaro a Honda, Junki a Sakaue, Hiroyuki a Takahagi, Takayuki a Suzuki, Hitoshi a

a HIROSHIMA UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM CURRENTS; FOCUSED-ION-BEAM SYSTEM; IN-SITU MEASUREMENT; ION BEAM CURRENTS; SCANNING ELECTRON MICROSCOPE; THROUGH HOLE;

BEAM PLASMA INTERACTIONS; FOCUSED ION BEAMS; ION BOMBARDMENT; METAL FOIL; NANOPORES; SCANNING ELECTRON MICROSCOPY;

IONS;

GALLIUM; ION; SILVER;

ARTICLE; ELECTRODE; INSTRUMENTATION; METHODOLOGY; NANOTECHNOLOGY; POROSITY; SCANNING ELECTRON MICROSCOPY;

ELECTRODES; GALLIUM; IONS; MICROSCOPY, ELECTRON, SCANNING; NANOTECHNOLOGY; POROSITY; SILVER;

EID: 73849134278 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.3270958 Document Type: Article

Times cited : (9)

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