|
Volumn 87, Issue 5-8, 2010, Pages 1300-1303
|
Direct FIB fabrication and integration of "single nanopore devices" for the manipulation of macromolecules
c
RAITH GmbH
(Germany)
|
Author keywords
Biosensor; Focused ion beam; Nanofabrication; Nanopore; Silicon nitride; Solid state nanopores
|
Indexed keywords
BIOMOLECULE ANALYSIS;
COLLOIDAL PARTICLE;
ELECTROPHORESIS EXPERIMENTS;
FOCUSED-ION-BEAM NANOFABRICATION;
FUNCTIONALIZATIONS;
NANOFABRICATION;
PROCESSING TECHNIQUE;
SOLID-STATE MEMBRANES;
SOLID-STATE NANOPORE;
BIOSENSORS;
DIELECTRIC FILMS;
ELECTRIC FIELDS;
ELECTROPHORESIS;
FOCUSED ION BEAMS;
SILICON NITRIDE;
NANOPORES;
|
EID: 76949084900
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mee.2009.12.073 Document Type: Article |
Times cited : (31)
|
References (12)
|