Atomic layer deposition to fine-tune the surface properties and diameters of fabricated nanopores

Nano Letters

Volumn 4, Issue 7, 2004, Pages 1333-1337

  Chen, Peng ^a   Mitsui, Toshiyuki ^b   Farmer, Damon B ^a   Golovchenko, Jene ^a,b   Gordon, Roy G ^a   Branton, Daniel ^a  

^a HARVARD UNIVERSITY   (United States)

^b HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DNA; POLYELECTROLYTE;

ACCURACY; ARTICLE; MOLECULAR DYNAMICS; MOLECULAR PROBE; NANOPARTICLE; PHYSICAL CHEMISTRY; POROSITY; SURFACE PROPERTY;

EID: 4143057920     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl0494001     Document Type: Article

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