Fabrication and characterization of solid-state nanopores using a field emission scanning electron microscope

Applied Physics Letters

Volumn 88, Issue 10, 2006, Pages

  Chang, Hung ^a   Iqbal, Samir M ^a   Stach, Eric A ^a   King, Alexander H ^a   Zaluzec, Nestor J ^b   Bashir, Rashid ^a  

^a PURDUE UNIVERSITY   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PORE SHRINKING; SOLID-STATE NANOPORES;

IRRADIATION; MICROMACHINING; RADIOLYSIS; SCANNING ELECTRON MICROSCOPY; SILICON; TRANSMISSION ELECTRON MICROSCOPY;

NANOSTRUCTURED MATERIALS;

EID: 33644916103     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2179131     Document Type: Article

References (14)

1. J. J. Kasianowicz, E. Brandin, D. Branton, and D. W. Deamer, Proc. Natl. Acad. Sci. U.S.A. 93, 13770 (1996).
2. J. Li, D. Stein, C. McMullan, D. Branton, M. J. Aziz, and J. A. Golovchenko, Nature (London) 412, 166 (2001).
3. A. J. Storm, J. H. Chen, X. S. Ling, H. W. Zandbergen, and C. Dekker, Nat. Mater. 2, 537 (2003).
4. J. Li, M. Gershow, D. Stein, E. Brandin, and J. Golovchenko, Nat. Mater. 2, 611 (2003).
5. H. Chang, F. Kosari, G. Andreadakis, M. A. Alam, G. Vasmatzis, and R. Bashir, Nano Lett. 4, 1551 (2004).
6. H. Chang, F. Kosari, G. Andreadakis, G. Vasmatzis, E. Basgall, A. H. King, and R. Bashir, in Proceedings of Hilton Head MEMS Conference, Hilton Head, South Carolina (2004), p. 204.
7. R. Nandakumar, P. Bhattacharya, and G. Kousik, Jpn. J. Appl. Phys., Part 1 31, 2651 (1992).
8. J. L. Maurice, A. Riviere, A. Alapini, and C. Levy-Clement, Appl. Phys. Lett. 66, 1665 (1995).
9. M. Enachescu, E. Hartmann, and F. Koch, J. Appl. Phys. 79, 2948 (1996).
10. S. Borini, G. Amato, M. Rocchia, L. Boarino, and A. Mario Rossi, J. Appl. Phys. 93, 4439 (2003).
11. J. C. Barbour, D. Dimos, T. R. Guilinger, M. J. Kelly, and S. S. Tsao, Appl. Phys. Lett. 59, 2088 (1991).
12. J. Sarathy, S. Shih, K. Jung, C. Tsai, K. H. Li, D. L. Kwong, and J. C. Campbell, Appl. Phys. Lett. 60, 1532 (1992).
13. R. T. Collins, M. A. Tischler, and J. H. Stathis, Appl. Phys. Lett. 61, 1649 (1992).
14. C. R. Bradley and N. J. Zaluzec, Ultramicroscopy 28, 226 (1989).