Laser micromachining for applications in thin film technology

Applied Surface Science

Volumn 154, Issue , 2000, Pages 633-639

  Pfleging, W ^a   Ludwig, A ^a   Seemann, K ^a   Preu, R ^b   MacKel H ^b   Glunz, S W ^b  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b FRAUNHOFER INSTITUTE FOR SOLAR ENERGY SYSTEMS ISE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; IRON ALLOYS; LASER ABLATION; METALLIC FILMS; MULTILAYERS; PULSED LASER APPLICATIONS; SILICA; SILICON NITRIDE; SOLAR CELLS; THICK FILMS; THIN FILMS;

LASER MICROMACHINING;

MICROMACHINING;

EID: 0033872463     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00468-7     Document Type: Article

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